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Extract from the Register of European Patents

EP About this file: EP0051174

EP0051174 - Electrode for a plasma etchings plant [Right-click to bookmark this link]
Former [1982/19]Electrode for a plasma etching plant
[1982/50]
StatusThe application is deemed to be withdrawn
Status updated on  16.12.1983
Database last updated on 17.09.2024
Most recent event   Tooltip07.07.2007Change - inventorpublished on 08.08.2007  [2007/32]
Applicant(s)For all designated states
SIEMENS AKTIENGESELLSCHAFT
Werner-von-Siemens-Str. 1
DE-80333 München / DE
[N/P]
Former [1982/19]For all designated states
SIEMENS AKTIENGESELLSCHAFT
Wittelsbacherplatz 2
D-80333 München / DE
Inventor(s)01 / Brabetz, Bernhard, Dipl.-Ing.
Böttcherstrasse 33
D-8000 München 60 / DE
02 / Mann, Wolfgang
Lindenstrasse 18
D-8150 Holzkirchen / DE
03 / Steiner, Rainer, Dipl.-Phys
Schneemannstrasse 1
D-8000 München 70 / DE
[1982/19]
Application number, filing date81108291.613.10.1981
[1982/19]
Priority number, dateDE1980304155104.11.1980         Original published format: DE 3041551
[1982/19]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP0051174
Date:12.05.1982
Language:DE
[1982/19]
Type: A3 Search report 
No.:EP0051174
Date:08.12.1982
Language:DE
[1982/49]
Search report(s)(Supplementary) European search report - dispatched on:EP06.10.1982
ClassificationIPC:H05K3/00, H05K3/26, H01L21/263, H05H1/24, C23F1/00, // C23F1/00
[1982/51]
CPC:
H05K3/0055 (EP); H05K2203/095 (EP)
Former IPC [1982/50]H05K3/00, H05K3/26, H01L21/263, C23F1/00, // C23F1/00
Former IPC [1982/50]H05K3/00, H01L21/263, H05H1/24, // C23F1/00
Former IPC [1982/19]H05K3/26, H01L21/263, H05H1/24, // C23F1/00
Designated contracting statesFR,   GB,   IT,   NL [1982/19]
TitleGerman:Elektroden für Plasma-Ätzanlage[1982/19]
English:Electrode for a plasma etchings plant[1982/50]
French:Electrode pour équipement de décapage de plasma[1982/19]
Former [1982/19]Electrode for a plasma etching plant
File destroyed:18.06.1989
Examination procedure13.10.1981Examination requested  [1982/19]
01.09.1983Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [1984/07]
12.11.1983Application deemed to be withdrawn, date of legal effect  [1984/07]
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Documents cited:Search[A]DE2536871  ;
 [A]WO8002353
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.