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Extract from the Register of European Patents

EP About this file: EP0104765

EP0104765 - Substrate structure of semiconductor device and method of manufacturing the same [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.04.1990
Database last updated on 16.09.2024
Most recent event   Tooltip18.04.1990No opposition filed within time limitpublished on 06.06.1990 [1990/23]
Applicant(s)For all designated states
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
1-6 Uchisaiwaicho 1-chome Chiyoda-ku
Tokyo / JP
[1985/48]
Former [1984/14]For all designated states
Nippon Telegraph and Telephone Public Corporation
1-6 Uchisaiwai-cho 1-chome Chiyoda-ku
Tokyo 100 / JP
Inventor(s)01 / Sakuma, Kazuhito
1048, Kawaraguchi
Ebina-shi Kanagawa-ken / JP
02 / Arita, Yoshinobu
861-1-8-506, Ishida
Isehara-shi Kanagawa-ken / JP
03 / Sato, Masaaki
861-1-2-101, Ishida
Isehara-shi Kanagawa-ken / JP
04 / Awaya, Nobuyoshi
2-183, Soubudai
Zama-shi Kanagawa-ken / JP
[1984/14]
Representative(s)Wood, Anthony Charles, et al
Urquhart-Dykes & Lord 30 Welbeck Street
London W1M 7PG / GB
[N/P]
Former [1989/26]Wood, Anthony Charles, et al
Urquhart-Dykes & Lord 91 Wimpole Street
London W1M 8AH / GB
Former [1986/06]Burnside, Michael
Urquhart-Dykes & Lord 91 Wimpole Street
London W1M 8AH / GB
Former [1985/48](deleted)
Former [1984/14]Burnside, Michael, et al
Urquhart-Dykes & Lord 91 Wimpole Street
London W1M 8AH / GB
Application number, filing date83304898.624.08.1983
[1984/14]
Priority number, dateJP1982014547124.08.1982         Original published format: JP 14547182
JP1983015248223.08.1983         Original published format: JP 15248283
[1984/14]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0104765
Date:04.04.1984
Language:EN
[1984/14]
Type: A3 Search report 
No.:EP0104765
Date:09.07.1986
Language:EN
[1986/28]
Type: B1 Patent specification 
No.:EP0104765
Date:21.06.1989
Language:EN
[1989/25]
Search report(s)(Supplementary) European search report - dispatched on:EP22.05.1986
ClassificationIPC:H01L21/76
[1984/14]
CPC:
H01L21/033 (EP); H01L21/76 (KR); H01L21/76229 (EP);
H01L21/76232 (EP)
Designated contracting statesDE,   FR,   GB,   NL [1984/14]
TitleGerman:Substratstruktur für eine Halbleiteranordnung und Verfahren zur Herstellung dieses Substrats[1984/14]
English:Substrate structure of semiconductor device and method of manufacturing the same[1984/14]
French:Structure de substrat pour dispositif semi-conducteur et procédé pour la fabrication du substrat[1984/14]
Examination procedure02.08.1986Examination requested  [1986/41]
16.11.1987Despatch of a communication from the examining division (Time limit: M06)
24.05.1988Reply to a communication from the examining division
13.09.1988Despatch of communication of intention to grant (Approval: Yes)
22.12.1988Communication of intention to grant the patent
21.02.1989Fee for grant paid
21.02.1989Fee for publishing/printing paid
Opposition(s)22.03.1990No opposition filed within time limit [1990/23]
Fees paidRenewal fee
24.08.1985Renewal fee patent year 03
19.07.1986Renewal fee patent year 04
20.08.1987Renewal fee patent year 05
22.07.1988Renewal fee patent year 06
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Documents cited:Search[Y]US4331708  (HUNTER WILLIAM R);
 [A]US4269636  (RIVOLI ANTHONY L, et al)
 [Y]  - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 24, no. 4, September 1981, pages 2185-2186, New York, US; G.R. GOTH et al.: "Prevention of defects in deep dielectric isolation trenches during oxidation"
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 23, no. 4, September 1980, pages 1405-1408, New York, US; C.T. HORNG et al.: "Device isolation by using a narrow SiO2 trench"
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 24, no. 11B, April 1982, pages 6008-6009, New York, US; B.M. KEMLAGE et al.: "Total dielectric isolation"
by applicantUS4269636
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.