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EP0169485
European procedure
Extract from the Register of European Patents
EP About this file: EP0169485
| EP0169485 - Method and apparatus for inducing photochemical reaction [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.10.1992 Database last updated on 09.09.2024 | Most recent event Tooltip | 08.10.1992 | No opposition filed within time limit | published on 25.11.1992 [1992/48] | Applicant(s) | For all designated states NEC Corporation 7-1, Shiba 5-chome Minato-ku Tokyo 108-8001 / JP | [N/P] |
| Former [1986/05] | For all designated states NEC CORPORATION 7-1, Shiba 5-chome Minato-ku Tokyo / JP | Inventor(s) | 01 /
Kishida, Shunji c/o NEC Corporation, 7-1 Shiba 5-chome Minato-ku Tokyo / JP | 02 /
Yokoyama, Hiroyuki c/o NEC Corporation, 7-1 Shiba 5-chome Minato-ku Tokyo / JP | 03 /
Morishige, Yukio c/o NEC Corporation, 7-1 Shiba 5-chome Minato-ku Tokyo / JP | 04 /
Washio, Kunihiko c/o NEC Corporation, 7-1 Shiba 5-chome Minato-ku Tokyo / JP | [1991/49] |
| Former [1986/05] | 01 /
Kishida, Shunji c/o NEC Corporation, 33-1 Shiba 5-chome Minato-ku Tokyo / JP | ||
| 02 /
Yokoyama, Hiroyuki c/o NEC Corporation, 33-1 Shiba 5-chome Minato-ku Tokyo / JP | |||
| 03 /
Morishige, Yukio c/o NEC Corporation, 33-1 Shiba 5-chome Minato-ku Tokyo / JP | |||
| 04 /
Washio, Kunihiko c/o NEC Corporation, 33-1 Shiba 5-chome Minato-ku Tokyo / JP | Representative(s) | Pätzold, Herbert Pasinger Strasse 6 82166 Gräfelfing / DE | [N/P] |
| Former [1989/49] | Pätzold, Herbert, Dr.-Ing. Steubstrasse 10 D-82166 Gräfelfing / DE | ||
| Former [1986/05] | Pätzold, Herbert, Dr. Steubstrasse 10 D-8032 Gräfelfing-München / DE | Application number, filing date | 85108906.0 | 16.07.1985 | [1986/05] | Priority number, date | JP19840148145 | 17.07.1984 Original published format: JP 14814584 | JP19840148146 | 17.07.1984 Original published format: JP 14814684 | JP19850061807 | 28.03.1985 Original published format: JP 6180785 | [1986/05] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0169485 | Date: | 29.01.1986 | Language: | EN | [1986/05] | Type: | A3 Search report | No.: | EP0169485 | Date: | 27.01.1988 | Language: | EN | [1988/04] | Type: | B1 Patent specification | No.: | EP0169485 | Date: | 04.12.1991 | Language: | EN | [1991/49] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 08.12.1987 | Classification | IPC: | G03F7/20, C23C16/48 | [1991/49] | CPC: |
G03F7/70808 (EP,US);
C23C16/483 (EP,US);
G03F7/004 (EP,US);
G03F7/70866 (EP,US)
|
| Former IPC [1988/01] | G03F7/10, G03F7/20, C23C16/48 | ||
| Former IPC [1986/05] | G03F7/10, G03F7/20 | Designated contracting states | DE, FR, GB, NL [1986/05] | Title | German: | Anreizverfahren und Vorrichtung für photochemische Reaktionen | [1986/05] | English: | Method and apparatus for inducing photochemical reaction | [1986/05] | French: | Méthode et appareil pour amorcer les réactions photochimiques | [1986/05] | Examination procedure | 28.04.1988 | Examination requested [1988/27] | 29.11.1990 | Despatch of a communication from the examining division (Time limit: M04) | 06.02.1991 | Reply to a communication from the examining division | 13.03.1991 | Despatch of communication of intention to grant (Approval: Yes) | 29.05.1991 | Communication of intention to grant the patent | 31.07.1991 | Fee for grant paid | 31.07.1991 | Fee for publishing/printing paid | Opposition(s) | 05.09.1992 | No opposition filed within time limit [1992/48] | Fees paid | Renewal fee | 30.07.1987 | Renewal fee patent year 03 | 29.07.1988 | Renewal fee patent year 04 | 31.07.1989 | Renewal fee patent year 05 | 30.07.1990 | Renewal fee patent year 06 | 31.07.1991 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 31.07.1990 | 06 M06 Fee paid on 13.10.1990 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP59040525 ; | [AD]JP57067161 ; | [A]EP0097819 (IBM [US]) | [A] - PATENT ABSTRACTS OF JAPAN, vol. 8, no. 127 (E-250)[1564], 14th June 1984; & JP-A-59 040 525 (MITSUBISHI DENKI K.K.) 06-03-1984, & JP59040525 A 00000000 | [AD] - APPLIED PHYSICS LETTERS, vol. 41, no. 11, 1st December 1982, pages 1048-1050, American Institute of Physics, New York, US; R. SOLANKI et al.: "Low-temperature refractory metal film deposition" | [AD] - PATENT ABSTRACTS OF JAPAN, vol. 6, no. 143 (C-117)[1021], 3rd August 1982; & JP-A-57 067 161 (NIPPON DENKI K.K.) 23-04-1982, & JP57067161 A 00000000 |