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EP0173164
European procedure
Extract from the Register of European Patents
EP About this file: EP0173164
| EP0173164 - Microwave assisting sputtering [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 13.09.1989 Database last updated on 03.09.2024 | Most recent event Tooltip | 15.08.2008 | Change - representative | published on 17.09.2008 [2008/38] | Applicant(s) | For all designated states Hitachi, Ltd. 6, Kanda Surugadai 4-chome Chiyoda-ku Tokyo / JP | [N/P] |
| Former [1986/10] | For all designated states HITACHI, LTD. 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 / JP | Inventor(s) | 01 /
Saito, Hiroshi 6395-80, Tsujido Fujisawa-shi Kanagawa-ken / JP | 02 /
Suzuki, Yasumichi Hitachi Keimei-ryo 850, Maioka-cho Totsuka-ku Yokohama-shi Kanagawa-ken / JP | 03 /
Sano, Shuuzoo Hitachi Koushin-ryo 850, Maioka-cho Totsuka-ku Yokohama-shi Kanagawa-ken / JP | 04 /
Shimizu, Tamotsu Hitachi Keimei-ryo 850, Maioka-cho Totsuka-ku Yokohama-shi Kanagawa-ken / JP | 05 /
Aiuchi, Susumu Totsuka-Highrise 425 884-1, Kamikurata-cho Totsuka-ku Yokohama-shi Kanagawa-ken / JP | [1986/10] | Representative(s) | Beetz & Partner mbB Patentanwälte Prinzregentenstraße 54 80538 München / DE | [N/P] |
| Former [2008/38] | Beetz & Partner Patentanwälte Steinsdorfstrasse 10 80538 München / DE | ||
| Former [1986/10] | Patentanwälte Beetz - Timpe - Siegfried Schmitt-Fumian - Mayr Steinsdorfstrasse 10 D-80538 München / DE | Application number, filing date | 85110155.0 | 13.08.1985 | [1986/10] | Priority number, date | JP19840180532 | 31.08.1984 Original published format: JP 18053284 | JP19840207058 | 04.10.1984 Original published format: JP 20705884 | JP19840223944 | 26.10.1984 Original published format: JP 22394484 | JP19850032604 | 22.02.1985 Original published format: JP 3260485 | [1986/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0173164 | Date: | 05.03.1986 | Language: | EN | [1986/10] | Type: | B1 Patent specification | No.: | EP0173164 | Date: | 09.11.1988 | Language: | EN | [1988/45] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 12.12.1985 | Classification | IPC: | H01L21/203, C23C14/28, H01J37/34 | [1986/10] | CPC: |
C23C14/357 (EP,US);
H01L21/203 (KR);
H01J37/3405 (EP,US)
| Designated contracting states | DE, FR, GB [1986/10] | Title | German: | Aufstäuben mittels Mikrowellen | [1986/10] | English: | Microwave assisting sputtering | [1986/10] | French: | Vaporisation à l'aide de micro-ondes | [1986/10] | Examination procedure | 10.03.1986 | Examination requested [1986/20] | 10.04.1987 | Despatch of a communication from the examining division (Time limit: M06) | 12.10.1987 | Reply to a communication from the examining division | 12.01.1988 | Despatch of communication of intention to grant (Approval: Yes) | 13.05.1988 | Communication of intention to grant the patent | 18.05.1988 | Fee for grant paid | 18.05.1988 | Fee for publishing/printing paid | Opposition(s) | 10.08.1989 | No opposition filed within time limit [1989/44] | Fees paid | Renewal fee | 21.08.1987 | Renewal fee patent year 03 | 25.08.1988 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | EP0103461 [ ] (NIPPON TELEGRAPH & TELEPHONE [JP]); | DE3322680 [ ] (HITACHI LTD [JP]); | US3325394 [ ] (ERIC KAY, et al) | [ ] - PATENT ABSTRACTS OF JAPAN, unexamined application, C-field, vol. 6, no. 114, June 25, 1982 THE PATENT OFFICE JAPANESE GOVERNMENT page 35C110 * JP - A - 57-41 375 ( NIPPPON SHINKU ) * |