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Extract from the Register of European Patents

EP About this file: EP0171105

EP0171105 - Method of manufacturing a semiconductor device [Right-click to bookmark this link]
Former [1986/07]Method of manufacturing a semiconductor device and device manufactured by the use of the method
[1990/24]
StatusNo opposition filed within time limit
Status updated on  13.04.1991
Database last updated on 14.09.2024
Most recent event   Tooltip13.04.1991No opposition filed within time limitpublished on 05.06.1991 [1991/23]
Applicant(s)For all designated states
Koninklijke Philips Electronics N.V.
Groenewoudseweg 1
5621 BA Eindhoven / NL
[N/P]
Former [1986/07]For all designated states
Philips Electronics N.V.
Groenewoudseweg 1
NL-5621 BA Eindhoven / NL
Inventor(s)01 / Maas, Henricus Godefridus Rafael
c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
02 / Slotboom, Jan Willem
c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
03 / Appels, Johannes Arnoldus
c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
04 / Osinksi, Kazimierz
c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
[1986/07]
Representative(s)Houbiers, Ernest Emile M. G., et al
INTERNATIONAAL OCTROOIBUREAU B.V., Prof. Holstlaan 6
5656 AA Eindhoven / NL
[N/P]
Former [1988/33]Houbiers, Ernest Emile Marie Gerlach, et al
INTERNATIONAAL OCTROOIBUREAU B.V., Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
Former [1988/29]Auwerda, Cornelis Petrus
INTERNATIONAAL OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
Former [1986/07]Voorrips, Hugo Carel
INTERNATIONAAL OCTROOIBUREAU B.V. Prof. Holstlaan 6
NL-5656 AA Eindhoven / NL
Application number, filing date85201077.604.07.1985
[1986/07]
Priority number, dateNL1984000222313.07.1984         Original published format: NL 8402223
[1986/07]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0171105
Date:12.02.1986
Language:EN
[1986/07]
Type: A3 Search report 
No.:EP0171105
Date:19.02.1986
Language:EN
[1986/08]
Type: B1 Patent specification 
No.:EP0171105
Date:13.06.1990
Language:EN
[1990/24]
Search report(s)(Supplementary) European search report - dispatched on:EP18.12.1985
ClassificationIPC:H01L21/28, H01L29/60
[1986/07]
CPC:
H01L29/66954 (EP,US); H01L29/42396 (EP,US); Y10S438/911 (EP,US)
Designated contracting statesCH,   DE,   FR,   GB,   IT,   LI,   NL [1986/07]
TitleGerman:Verfahren zur Herstellung einer Halbleiteranordnung[1990/24]
English:Method of manufacturing a semiconductor device[1990/24]
French:Procédé de fabrication d'un dispositif semi-conducteur[1990/24]
Former [1986/07]Verfahren zur Herstellung einer Halbleiteranordnung und nach diesem Verfahren hergestellte Anordnung
Former [1986/07]Method of manufacturing a semiconductor device and device manufactured by the use of the method
Former [1986/07]Procédé de fabrication d'un dispositif semi-conducteur et dispositif fabriqué selon ce procédé
Examination procedure14.08.1986Examination requested  [1986/43]
05.08.1988Despatch of a communication from the examining division (Time limit: M06)
10.02.1989Reply to a communication from the examining division
17.04.1989Despatch of a communication from the examining division (Time limit: M02)
27.06.1989Reply to a communication from the examining division
28.07.1989Despatch of communication of intention to grant (Approval: Yes)
08.12.1989Communication of intention to grant the patent
12.03.1990Fee for grant paid
12.03.1990Fee for publishing/printing paid
Opposition(s)14.03.1991No opposition filed within time limit [1991/23]
Fees paidRenewal fee
13.07.1987Renewal fee patent year 03
19.07.1988Renewal fee patent year 04
14.07.1989Renewal fee patent year 05
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Documents cited:Search[E]EP0158371  (PHILIPS NV [NL]);
 [P]EP0132009  (PHILIPS NV [NL]);
 [A]EP0098652  (PHILIPS NV [NL])
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 24, no. 11a, April 1982, pages 5581-5584, New York, US; S.D. MALAVIYA: "High desity, high performance FET process and structure"
 [A]  - IEEE ELECTRON DEVICE LETTERS, vol.EDL-2, no. 4, April 1981, pages 92-94, IEEE, New York, US; V.J. KAPOOR: "Charge-coupled devices with submicron gaps"
 [A]  - IBM JOURNAL RESEARCH DEVELOPMENT, vol. 24, no. 3, May 1980, pages 339-347, New York, US; V.L. RIDEOUT et al.: "A one-device memory cell using a single layer of polysilicon and a self-registering metal-to-polysilicon contact"
 [A]  - IEDM WASHINGTON, 8th-10th December 1980, pages 760-763, IEEE, New York, US; F.Z. CUSTODE et al.: "VLSI-A totally self-aligned MOS transistor"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.