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EP0231542
European procedure
Extract from the Register of European Patents
EP About this file: EP0231542
| EP0231542 - Particle detector for wafer processing equipment and method of detecting a particle [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.07.1991 Database last updated on 24.08.2024 | Most recent event Tooltip | 23.11.2007 | Lapse of the patent in a contracting state Updated state(s): FR | published on 26.12.2007 [2007/52] | Applicant(s) | For all designated states High Yield Technology 2400 Bayshore Frontage Road Mountain View, CA 94043 / US | [1987/33] | Inventor(s) | 01 /
Borden, Peter 354 Tennessee Lane Palo Alto, CA 94306 / US | [1987/33] | Representative(s) | Noz, Franciscus Xaverius, et al Algemeen Octrooibureau P.O. Box 645 5600 AP Eindhoven / NL | [N/P] |
| Former [1987/33] | Noz, Franciscus Xaverius, Ir., et al Algemeen Octrooibureau P.O. Box 645 NL-5600 AP Eindhoven / NL | Application number, filing date | 86202212.6 | 08.12.1986 | [1987/33] | Priority number, date | US19850807395 | 10.12.1985 Original published format: US 807395 | US19850807901 | 11.12.1985 Original published format: US 807901 | US19860907776 | 16.09.1986 Original published format: US 907776 | [1987/33] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0231542 | Date: | 12.08.1987 | Language: | EN | [1987/33] | Type: | A3 Search report | No.: | EP0231542 | Date: | 13.07.1988 | Language: | EN | [1988/28] | Type: | B1 Patent specification | No.: | EP0231542 | Date: | 26.09.1990 | Language: | EN | [1990/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 25.05.1988 | Classification | IPC: | G01N15/02, G01N15/10, G01N21/47, G01N21/53 | [1987/33] | CPC: |
G01N21/53 (EP);
G01N2015/0238 (EP);
G01N2021/516 (EP)
| Designated contracting states | BE, DE, FR, GB, IT [1987/33] | Title | German: | Teilchenerfasser für Waferbearbeitungsgerät und Verfahren zur Erfassung eines Teilchens | [1987/33] | English: | Particle detector for wafer processing equipment and method of detecting a particle | [1987/33] | French: | Détecteur de particules pour des appareils de traitement de wafers et procédé pour la détection d'un particule | [1987/33] | File destroyed: | 15.01.2000 | Examination procedure | 10.01.1989 | Examination requested [1989/10] | 01.06.1989 | Despatch of a communication from the examining division (Time limit: M06) | 13.10.1989 | Reply to a communication from the examining division | 19.01.1990 | Despatch of communication of intention to grant (Approval: Yes) | 28.03.1990 | Communication of intention to grant the patent | 25.06.1990 | Fee for grant paid | 25.06.1990 | Fee for publishing/printing paid | Opposition(s) | 27.06.1991 | No opposition filed within time limit [1991/38] | Fees paid | Renewal fee | 11.11.1988 | Renewal fee patent year 03 | 31.05.1990 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 02.01.1990 | 04 M06 Fee paid on 31.05.1990 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | BE | 26.09.1990 | FR | 26.09.1990 | IT | 26.09.1990 | [2006/14] |
| Former [1999/42] | BE | 26.09.1990 | |
| IT | 26.09.1990 | ||
| FR | 15.02.1991 | ||
| Former [1991/50] | BE | 26.09.1990 | |
| FR | 15.02.1991 | ||
| Former [1991/35] | BE | 26.09.1990 | Documents cited: | Search | [X]JP5539047 ; | [X]JP57042842 ; | [AP]EP0203600 ; | [A]US3578867 ; | [A]US3708675 | [X] - PATENT ABSTRACTS OF JAPAN, vol. 4, no. 74 (P-13)[556], 30th May 1980; & JP - A - 55 39047 (RICOH K.K.) 18-03-1980, & JP5539047 A 00000000 | [X] - PATENT ABSTRACTS OF JAPAN, vol. 6, no. 112 (P-124)[990], 23th June 1982; & JP - A - 57 042 842 (NITSUTAD K.K.) 10-03-1982, & JP57042842 A 00000000 | [A] - APPLIED OPTICS, vol. 18, no. 7, 1st April 1979, pages 1009-1014, Optical Society of America, US; H.E. GERBER: "Portable cell for simultaneously measuring the coefficients of light scattering and extinction for ambient aerosols" |