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Extract from the Register of European Patents

EP About this file: EP0239746

EP0239746 - Method for manufacturing a semiconductor device [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  02.03.1995
Database last updated on 07.10.2024
Most recent event   Tooltip02.03.1995No opposition filed within time limitpublished on 19.04.1995 [1995/16]
Applicant(s)For all designated states
Kabushiki Kaisha Toshiba
72, Horikawa-cho, Saiwai-ku Kawasaki-shi
Kanagawa-ken 210-8572 / JP
[N/P]
Former [1987/41]For all designated states
KABUSHIKI KAISHA TOSHIBA
72, Horikawa-cho, Saiwai-ku
Kawasaki-shi, Kanagawa-ken 210, Tokyo / JP
Inventor(s)01 / Nagakubo, Yoshihide Patent Div.
K.K. Toshiba 1-1 Shibaura 1-chome
Minato-ku Tokyo 105 / JP
[1987/41]
Representative(s)Lehn, Werner, et al
Hoffmann Eitle, Patent- und Rechtsanwälte, Postfach 81 04 20
81904 München / DE
[N/P]
Former [1987/41]Lehn, Werner, Dipl.-Ing., et al
Hoffmann, Eitle & Partner, Patentanwälte, Postfach 81 04 20
D-81904 München / DE
Application number, filing date87101503.804.02.1987
[1987/41]
Priority number, dateJP1986003269719.02.1986         Original published format: JP 3269786
[1987/41]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0239746
Date:07.10.1987
Language:EN
[1987/41]
Type: A3 Search report 
No.:EP0239746
Date:23.11.1989
Language:EN
[1989/47]
Type: B1 Patent specification 
No.:EP0239746
Date:27.04.1994
Language:EN
[1994/17]
Search report(s)(Supplementary) European search report - dispatched on:EP02.10.1989
ClassificationIPC:H01L21/205, H01L21/306, H01L21/86, H01L21/3205
[1994/17]
CPC:
H01L21/4846 (EP,US); H01L21/86 (EP,US); H01L23/4825 (EP,US);
H01L2924/0002 (EP,US); Y10S148/15 (EP,US)
C-Set:
H01L2924/0002, H01L2924/00 (EP,US)
Former IPC [1989/49]H01L21/205, H01L21/306, H01L21/86
Former IPC [1987/41]H01L21/205, H01L21/306
Designated contracting statesDE,   FR,   GB [1987/41]
TitleGerman:Verfahren zur Herstellung von Halbleiterbauelementen[1987/41]
English:Method for manufacturing a semiconductor device[1987/41]
French:Procédé de fabrication de dispositif à semi-conducteur[1987/41]
Examination procedure04.02.1987Examination requested  [1987/41]
26.05.1992Despatch of a communication from the examining division (Time limit: M06)
25.11.1992Reply to a communication from the examining division
11.12.1992Despatch of a communication from the examining division (Time limit: M02)
19.02.1993Reply to a communication from the examining division
31.03.1993Despatch of communication of intention to grant (Approval: Yes)
04.08.1993Communication of intention to grant the patent
26.10.1993Fee for grant paid
26.10.1993Fee for publishing/printing paid
Opposition(s)28.01.1995No opposition filed within time limit [1995/16]
Fees paidRenewal fee
10.02.1989Renewal fee patent year 03
14.02.1990Renewal fee patent year 04
17.12.1990Renewal fee patent year 05
10.02.1992Renewal fee patent year 06
08.02.1993Renewal fee patent year 07
08.02.1994Renewal fee patent year 08
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Documents cited:Search[A]EP0049400  (TOKYO SHIBAURA ELECTRIC CO [JP]);
 [A]US4348804  (OGAWA MITSURU, et al);
 [AP]EP0191981  (MARCONI ELECTRONIC DEVICES [GB])
 [A]  - IEEE JOURNAL OF SOLID-STATE CIRCUITS vol. SC-11, no. 2, April 1976, pages 329-336; A.C. IPRI et al.: "Low-Threshold Low-Power CMOS/SOS for High-Frequency Counter Applictions"
 [A]  - IEEE TRANSACTIONS ON NUCLEAR SCIENCE vol. NS-24, no. 6, December 1977, pages 2205-2208; S. N. LEE et al.: "Radiation-Hardened Silicon-Gate SMOS/SOS"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.