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EP0247651
European procedure
Extract from the Register of European Patents
EP About this file: EP0247651
| EP0247651 - Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 07.01.1993 Database last updated on 11.04.2026 | Most recent event Tooltip | 07.01.1993 | No opposition filed within time limit | published on 24.02.1993 [1993/08] | Applicant(s) | For all designated states Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | [N/P] |
| Former [1987/49] | For all designated states Philips Electronics N.V. Groenewoudseweg 1 NL-5621 BA Eindhoven / NL | Inventor(s) | 01 /
Reimer, Jan Dirk c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6 NL-5656 AA Eindhoven / NL | 02 /
Akylas, Victor Renos c/o INT. OCTROOIBUREAU B.V. Prof. Holstlaan 6 NL-5656 AA Eindhoven / NL | [1987/49] | Representative(s) | Scheele, Edial François, et al INTERNATIONAAL OCTROOIBUREAU B.V. Prof. Holstlaan 6 5656 AA Eindhoven / NL | [N/P] |
| Former [1987/49] | Scheele, Edial François, et al INTERNATIONAAL OCTROOIBUREAU B.V. Prof. Holstlaan 6 NL-5656 AA Eindhoven / NL | Application number, filing date | 87200799.2 | 28.04.1987 | [1987/49] | Priority number, date | US19860858613 | 01.05.1986 Original published format: US 858613 | [1987/49] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0247651 | Date: | 02.12.1987 | Language: | EN | [1987/49] | Type: | B1 Patent specification | No.: | EP0247651 | Date: | 04.03.1992 | Language: | EN | [1992/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 01.09.1987 | Classification | IPC: | G01R31/28, H01L21/66 | [1987/49] | CPC: |
G01R31/305 (EP,US);
G01R19/00 (KR)
| Designated contracting states | CH, DE, FR, GB, LI, NL [1987/49] | Title | German: | Elektronenstrahlprüfvorrichtung mit einer Prüfeinrichtung in der Form fingerartig ineinandergreifender elektrischer Leiter, sowie Methode zur Anwendung dieser Prüfschaltung | [1987/49] | English: | Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device | [1987/49] | French: | Sonde à rayon d'électron utilisant un dispositif de test électriquement conducteur en forme de doigts s'intercalant et méthode pour appliquer ledit circuit de test | [1987/49] | File destroyed: | 12.06.1999 | Examination procedure | 26.05.1988 | Examination requested [1988/30] | 19.04.1991 | Despatch of communication of intention to grant (Approval: Yes) | 29.08.1991 | Communication of intention to grant the patent | 19.11.1991 | Fee for grant paid | 19.11.1991 | Fee for publishing/printing paid | Opposition(s) | 05.12.1992 | No opposition filed within time limit [1993/08] | Fees paid | Renewal fee | 25.04.1989 | Renewal fee patent year 03 | 24.04.1990 | Renewal fee patent year 04 | 25.04.1991 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CH | 04.03.1992 | LI | 04.03.1992 | NL | 04.03.1992 | [1992/48] |
| Former [1992/37] | CH | 04.03.1992 | |
| LI | 04.03.1992 | Documents cited: | Search | [A] JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 3, no. 1, January/February 1985, pages 383-385, American Vacuum Society, New York, US; A. ITO et al.: "Improved energy analyzer for voltage measurement in electron beam probing for LSI diagnosis" [A] |