-
EP0249564
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP0249564
| EP0249564 - Differential plane mirror interferometer having beamsplitter/beam folder assembly [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 11.05.1990 Database last updated on 13.11.2024 | Most recent event Tooltip | 07.07.2007 | Change - inventor | published on 08.08.2007 [2007/32] | Applicant(s) | For all designated states ZYGO CORPORATION Laurel Brook Road Middlefield Connecticut 06455 / US | [N/P] |
| Former [1987/51] | For all designated states ZYGO CORPORATION Laurel Brook Road Middlefield Connecticut 06455 / US | Inventor(s) | 01 /
Sommargren, Gary E. 119 Neck Road Madison Connecticut 06443 / US | 02 /
Young, Peter S. 307 Cherry Hill Road Middlefield Connecticut 06455 / US | [1987/51] | Representative(s) | Levesque, Denys, et al Cabinet Beau de Loménie 158, rue de l'Université 75340 Paris Cédex 07 / FR | [N/P] |
| Former [1987/51] | Levesque, Denys, et al Cabinet Beau de Loménie 158, rue de l'Université F-75340 Paris Cédex 07 / FR | Application number, filing date | 87401334.5 | 12.06.1987 | [1987/51] | Priority number, date | US19860873406 | 12.06.1986 Original published format: US 873406 | [1987/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0249564 | Date: | 16.12.1987 | Language: | EN | [1987/51] | Type: | A3 Search report | No.: | EP0249564 | Date: | 10.05.1989 | Language: | EN | [1989/19] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.03.1989 | Classification | IPC: | G01B9/02, G01D5/26 | [1987/51] | CPC: |
G01B9/02018 (EP);
G01B9/02057 (EP);
G01B2290/70 (EP)
| Designated contracting states | DE, FR, GB [1987/51] | Title | German: | Differentialplanspiegelinterferometer mit Strahlteiler-/Strahlfaltungseinheit | [1987/51] | English: | Differential plane mirror interferometer having beamsplitter/beam folder assembly | [1987/51] | French: | Interféromètre à miroir plan différentiel ayant un ensemble à séparation et à plieur de faisceaux | [1987/51] | File destroyed: | 16.03.1999 | Examination procedure | 01.07.1989 | Application deemed to be withdrawn, date of legal effect [1990/26] | 29.01.1990 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [1990/26] | Fees paid | Penalty fee | Penalty fee Rule 85b EPC 1973 | 05.12.1989 | M01 Not yet paid | Additional fee for renewal fee | 30.06.1989 | 03 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US3788746 ; | [A]US3656853 ; | [A]JPS60233502 | [A] - PATENT ABSTRACTS OF JAPAN, vol. 10, no. 101 (P-447)[2158]17th April 1986; & JP-A-60 233 502 (YOKOGAWA HIYUURETSUTO PATSUKAADO K.K.) 20-11-1988 | [AD] - JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS, vol. 17, no. 8, August 1984, pages 669-673, The Institute of Physics, WolverhamptonGB; M. OKAJI et al.: "A practical measurement system for the accurate determination of linear thermal expansion coefficients" | [A] - OPTIK, vol. 70, no. 2, May 1985, pages 58-63, StuttgartDE; R. PROBST: "]ber die Justierung eines Polarisationsteilerprismas in einem hochauflösenden Zweistrahlinterferometer" | [A] - REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 56, no. 8, August 1985, pages 1604-1607, American Institute of Physics, Woodbury, New YorkUS; P. NIAY et al.: "Polarization interferometer for angular masurements" | [A] - PROCEEDINGS ICO CONFERENCE OPT. METHODS IN SCI. AND IND. MEAS., Tokyo, 1974, Japanese Journal of Applied Physics, vol. 14, Suppl. 14-1, 1975pages 373-377; I.M. ANDREWS: "An optical technique for analysis of the behaviour of flying heads in computer disc files" | [A] - JOURNAL OF PHYSICS E. SCIENTIFIC INSTRUMENTS, vol. 16, 1983, pages 1208-1213, The Institute of PhysicsGB; M. OKAJI et al.: "High-resolution multifold path interferometers for dilatometric measurements" |