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EP0283007
European procedure
Extract from the Register of European Patents
EP About this file: EP0283007
| EP0283007 - Chemical vapour deposition apparatus having a perforated head [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.11.1992 Database last updated on 03.09.2024 | Most recent event Tooltip | 26.11.1992 | No opposition filed within time limit | published on 13.01.1993 [1993/02] | Applicant(s) | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | [N/P] |
| Former [1988/38] | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 / JP | Inventor(s) | 01 /
Mieno, Fumitake c/o Fujitsu Limited Patent Dep. Kosugi Fujitsu Building 1812-10 Shimonumabe Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | [1988/38] | Representative(s) | Greenstreet, Cyril Henry, et al Haseltine Lake & Co. Hazlitt House 28 Southampton Buildings Chancery Lane London WC2A 1AT / GB | [1988/38] | Application number, filing date | 88104251.9 | 17.03.1988 | [1988/38] | Priority number, date | JP19870061811 | 17.03.1987 Original published format: JP 6181187 | [1988/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0283007 | Date: | 21.09.1988 | Language: | EN | [1988/38] | Type: | A3 Search report | No.: | EP0283007 | Date: | 19.10.1988 | Language: | EN | [1988/42] | Type: | B1 Patent specification | No.: | EP0283007 | Date: | 22.01.1992 | Language: | EN | [1992/04] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 01.09.1988 | Classification | IPC: | C23C16/44, C23C16/54 | [1988/38] | CPC: |
C23C16/45565 (EP,US);
H01L21/205 (KR);
C23C16/455 (EP,US);
C23C16/45504 (EP,US)
| Designated contracting states | DE, FR, GB [1988/38] | Title | German: | Vorrichtung zur Beschichtung durch Abscheidung aus der Gasphase mit perforierter Düse | [1988/38] | English: | Chemical vapour deposition apparatus having a perforated head | [1988/38] | French: | Buse perforée d'un dispositif de dépôt chimique en phase vapeur | [1988/38] | Examination procedure | 12.01.1989 | Examination requested [1989/11] | 19.03.1990 | Despatch of a communication from the examining division (Time limit: M04) | 12.07.1990 | Reply to a communication from the examining division | 16.10.1990 | Despatch of communication of intention to grant (Approval: No) | 03.04.1991 | Despatch of a communication from the examining division (Time limit: M02) | 13.06.1991 | Reply to a communication from the examining division | 25.06.1991 | Despatch of communication of intention to grant (Approval: later approval) | 01.07.1991 | Communication of intention to grant the patent | 23.08.1991 | Fee for grant paid | 23.08.1991 | Fee for publishing/printing paid | Opposition(s) | 23.10.1992 | No opposition filed within time limit [1993/02] | Fees paid | Renewal fee | 12.03.1990 | Renewal fee patent year 03 | 12.03.1991 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP61104080 ; | [A]JP60081093 ; | [A]JP52060570 ; | [A]US3745969 (HUFFMAN R, et al); | [A]US4499853 (MILLER EDWARD A [US]); | [A]US4649859 (WANLASS MARK [US]) | [A] - PATENT ABSTRACTS OF JAPAN, vol. 10, no. 287 (C-375)[2343], 30th September 1986; & JP-A-61 104 080 (HITACHI LTD) 22-05-1986, & JP61104080 A 00000000 | [A] - PATENT ABSTRACTS OF JAPAN, vol. 9, no. 218 (C-301)[1941], 5th September 1985; & JP-A-60 081 093 (NIPPON SHINKU GIJUTSU K.K.) 09-05-1985, & JP60081093 A 00000000 | [A] - PATENT ABSTRACTS OF JAPAN, vol. 1, no. 127 (E-77)[5546], 21-10-1977; & JP-A-52 060 570 (TOKYO SHIBAURA DENKI K.K.) 19-05-1977, & JP52060570 A 00000000 |