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Extract from the Register of European Patents

EP About this file: EP0301604

EP0301604 - Apparatus for coating a substrate by plasma-chemical vapour deposition or cathodic sputtering, and process using the apparatus [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  31.03.1994
Database last updated on 18.11.2024
Most recent event   Tooltip23.12.1999Lapse of the patent in a contracting state
New state(s): LU		published on 09.02.2000 [2000/06]
Applicant(s)For:DE 
Philips Corporate Intellectual Property GmbH
Habsburgerallee 11
52064 Aachen / DE
For:BE  FR  GB  IT  LU  NL  SE 
Koninklijke Philips Electronics N.V.
Groenewoudseweg 1
5621 BA Eindhoven / NL
[N/P]
Former [1989/05]For:DE 
Philips Patentverwaltung GmbH
Röntgenstrasse 24
D-22335 Hamburg / DE
For:BE  FR  GB  IT  LU  NL  SE 
Philips Electronics N.V.
Groenewoudseweg 1
NL-5621 BA Eindhoven / NL
Inventor(s)01 / Bringmann, Udo
Schulstrasse 18
D-2083 Halstenbek / DE
02 / Drews, Klaus
Gärtnerstrasse 35
D-2083 Halstenbek / DE
03 / Schön, Detlef Gerd, Dr.
Ulmenweg 10
D-2083 Halstenbek / DE
04 / Dössel, Olaf Helmut, Dr.
Danziger Strasse 18
D-2086 Ellerau / DE
05 / Gerstenberg, Klaus Wolfgang, Dr.
Papermoorweg 2
D-2083 Halstenbek / DE
06 / Kürsten, Gerhard
Ostfalenweg 16
D-2000 Hamburg 61 / DE
07 / Orlowski, Reiner Uwe, Dr.
Rotdornweg 17
D-2085 Quickborn / DE
[1989/05]
Representative(s)Kupfermann, Fritz-Joachim, et al
Philips Patentverwaltung GmbH
Postfach 10 51 49
20035 Hamburg / DE
[N/P]
Former [1992/10]Kupfermann, Fritz-Joachim, Dipl.-Ing., et al
Philips Patentverwaltung GmbH Postfach 10 51 49
D-20035 Hamburg / DE
Former [1989/05]Nehmzow-David, Fritzi-Maria
Grotelertreppe 1
D-21075 Hamburg 90 / DE
Application number, filing date88113029.821.01.1985
[1989/05]
Priority number, dateDE1984340304230.01.1984         Original published format: DE 3403042
DE1984340297128.01.1984         Original published format: DE 3402971
[1989/05]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP0301604
Date:01.02.1989
Language:DE
[1989/05]
Type: A3 Search report 
No.:EP0301604
Date:12.04.1989
Language:DE
[1989/15]
Type: B1 Patent specification 
No.:EP0301604
Date:26.05.1993
Language:DE
[1993/21]
Search report(s)(Supplementary) European search report - dispatched on:EP21.02.1989
ClassificationIPC:C23C14/34, C23C16/50, H01J37/32
[1989/05]
CPC:
C23C14/34 (EP); C23C16/5096 (EP); H01J37/3244 (EP);
H01J37/34 (EP); H01L21/67017 (EP)
Designated contracting statesBE,   DE,   FR,   GB,   IT,   LU,   NL,   SE [1989/05]
TitleGerman:Vorrichtung zur Beschichtung eines Substrates mittels Plasma-Chemical Vapour Deposition oder Kathodenzerstäubung und damit ausgeführtes Verfahren[1989/05]
English:Apparatus for coating a substrate by plasma-chemical vapour deposition or cathodic sputtering, and process using the apparatus[1989/05]
French:Dispositif pour le revêtement d'un substrat par dépôt chimique en phase vapeur avec un plasma ou par pulvérisation cathodique et procédé utilisant ce dispositif[1989/05]
Examination procedure04.10.1989Examination requested  [1989/48]
01.04.1992Despatch of a communication from the examining division (Time limit: M04)
31.07.1992Reply to a communication from the examining division
21.08.1992Despatch of communication of intention to grant (Approval: Yes)
27.11.1992Communication of intention to grant the patent
04.03.1993Fee for grant paid
04.03.1993Fee for publishing/printing paid
Parent application(s)   TooltipEP85200054.6  / EP0150878
Opposition(s)01.03.1994No opposition filed within time limit [1994/21]
Fees paidRenewal fee
31.08.1988Renewal fee patent year 03
31.08.1988Renewal fee patent year 04
12.12.1988Renewal fee patent year 05
29.01.1990Renewal fee patent year 06
29.01.1991Renewal fee patent year 07
28.01.1992Renewal fee patent year 08
27.01.1993Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipBE26.05.1993
NL26.05.1993
LU31.01.1994
[2000/06]
Former [1997/17]BE26.05.1993
NL26.05.1993
Former [1994/09]BE26.05.1993
NL26.05.1993
Former [1994/01]NL26.05.1993
Documents cited:Search[A]JP56049521  ;
 [A]JP57172741  ;
 [A]FR2339001  ;
 [A]US3748253
 [A]  - PATENT ABSTRACTS OF JAPAN, Band 5, Nr. 109 (E-65)[781], 15. Juli 1981; & JP-A-56 049 521 (YASUMITSU KAJIWARA) 06-05-1981, & JP56049521 A 00000000
 [A]  - PATENT ABSTRACTS OF JAPAN, Band 7, Nr. 13, (E-153)[1158], 19. Januar 1983; & JP-A-57 172 741 (NIPPON DENSHIN DENWA KOSHA) 23-10-1982, & JP57172741 A 00000000
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, Band 26, Nr. 2, Juli 1983, Seite 588, New York, US; B.L. RATHBUN et al.: "Passivating coating"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.