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Extract from the Register of European Patents

EP About this file: EP0293177

EP0293177 - Apparatus for measuring the thickness of a thin film [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  06.12.1991
Database last updated on 31.08.2024
Most recent event   Tooltip31.07.2009Change - representativepublished on 02.09.2009  [2009/36]
Applicant(s)For all designated states
Kurashiki Boseki Kabushiki Kaisha
7-1, Hommachi Kurashiki-shi
Okayama 710 / JP
[N/P]
Former [1988/48]For all designated states
Kurashiki Boseki Kabushiki Kaisha
7-1, Hommachi
Kurashiki-shi Okayama 710 / JP
Inventor(s)01 / Koashi, Katsue
C-25, 2-7, Shinsenri Higashi-machi
Toyanaka-shi Osaka-fu / JP
02 / Eguchi, Yosuke
3-12-14, Miyanokawara
Takatsuki-shi Osaka-fu / JP
[1988/48]
Representative(s)Calderbank, Thomas Roger, et al
Mewburn Ellis LLP
City Tower
40 Basinghall Street
London EC2V 5DE / GB
[N/P]
Former [2009/36]Calderbank, Thomas Roger, et al
Mewburn Ellis LLP 33 Gutter Lane London
EC2V 8AS / GB
Former [1988/48]Calderbank, Thomas Roger, et al
MEWBURN ELLIS York House 23 Kingsway
London WC2B 6HP / GB
Application number, filing date88304718.525.05.1988
[1988/48]
Priority number, dateJP1987012896225.05.1987         Original published format: JP 12896287
JP1988012415520.05.1988         Original published format: JP 12415588
[1988/48]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0293177
Date:30.11.1988
Language:EN
[1988/48]
Type: A3 Search report 
No.:EP0293177
Date:28.11.1990
Language:EN
[1990/48]
Search report(s)(Supplementary) European search report - dispatched on:EP09.10.1990
ClassificationIPC:G01B11/06
[1988/48]
CPC:
G01B11/06 (EP,US); G01B11/0675 (EP,US)
Designated contracting statesDE,   GB [1988/48]
TitleGerman:Vorrichtung zur Dickenmessung einer dünnen Schicht[1988/48]
English:Apparatus for measuring the thickness of a thin film[1988/48]
French:Appareil pour la mesure d'épaisseur d'une couche mince[1988/48]
File destroyed:12.03.1999
Examination procedure02.09.1991Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [1992/04]
29.11.1991Application deemed to be withdrawn, date of legal effect  [1992/04]
Fees paidRenewal fee
28.05.1990Renewal fee patent year 03
Penalty fee
Penalty fee Rule 85b EPC 1973
05.07.1991M01   Not yet paid
Additional fee for renewal fee
31.05.199104   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]US3016464  (BAILEY EDWIN M);
 [A]US3319515  (FLOURNOY PHILIP A);
 [A]US4660980  (TAKABAYASHI HITOSHI [JP], et al);
 [A]US3551056  (BURLINGTON JOHN R FAY, et al);
 [A]US4518998  (WARNER ANDREW [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.