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Extract from the Register of European Patents

EP About this file: EP0326843

EP0326843 - Coating chamber with regulated composition of the gas mixture [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  21.01.1993
Database last updated on 28.09.2024
Most recent event   Tooltip21.01.1993No opposition filed within time limitpublished on 10.03.1993 [1993/10]
Applicant(s)For all designated states
Multi-Arc Oberflächentechnik GmbH
Am Böttcherberg 30-38
51429 Bergisch Gladbach / DE
[N/P]
Former [1991/50]For all designated states
Multi-Arc Oberflächentechnik GmbH
Am Böttcherberg 30-38
D-51429 Bergisch Gladbach / DE
Former [1991/24]For all designated states
MULTI-ARC GmbH
Friedrich-Ebert-Strasse
D-5060 Bergisch Gladbach 1 / DE
Former [1989/32]For all designated states
INTERATOM Gesellschaft mit beschränkter Haftung
Friedrich-Ebert-Strasse
D-51429 Bergisch Gladbach / DE
Inventor(s)01 / Maxam, Siegfried
Unterschelmrath 27
D-5250 Engelskirchen / DE
02 / Frink, Lothar
Am Heidberg 5
D-5223 Nümbrecht / DE
[1989/32]
Representative(s)Brinkmann & Partner, et al
Patentanwälte
Partnerschaft mbB
Am Seestern 8
40547 Düsseldorf / DE
[N/P]
Former [1992/03]Stenger, Watzke & Ring Patentanwälte, et al
Kaiser-Friedrich-Ring 70
D-40547 Düsseldorf / DE
Former [1990/08]Fuchs, Franz-Josef, Dr.-Ing.
Postfach 22 13 17
D-80503 München / DE
Former [1989/32]Mehl, Ernst, Dipl.-Ing.
Postfach 22 13 17
D-80503 München / DE
Application number, filing date89100664.516.01.1989
[1989/32]
Priority number, dateDE19880001079U29.01.1988         Original published format: DE 8801079 U
[1989/32]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report 
No.:EP0326843
Date:09.08.1989
Language:DE
[1989/32]
Type: B1 Patent specification 
No.:EP0326843
Date:18.03.1992
Language:DE
[1992/12]
Search report(s)(Supplementary) European search report - dispatched on:EP08.06.1989
ClassificationIPC:C23C14/54, H01J37/32
[1989/32]
CPC:
H01J37/3244 (EP); C23C14/0042 (EP)
Designated contracting statesAT,   BE,   CH,   DE,   ES,   FR,   GB,   IT,   LI,   LU,   NL,   SE [1989/32]
TitleGerman:Beschichtungskammer mit geregelter Zusammensetzung der Gasatmosphäre[1989/32]
English:Coating chamber with regulated composition of the gas mixture[1989/32]
French:Chambre de revêtement avec composition contrôlée des gaz[1989/32]
Examination procedure30.08.1989Examination requested  [1989/43]
11.07.1991Despatch of communication of intention to grant (Approval: Yes)
26.08.1991Communication of intention to grant the patent
14.11.1991Fee for grant paid
14.11.1991Fee for publishing/printing paid
Opposition(s)19.12.1992No opposition filed within time limit [1993/10]
Fees paidRenewal fee
20.12.1990Renewal fee patent year 03
11.12.1991Renewal fee patent year 04
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Documents cited:Search[A]JP54103790  ;
 [A]JP60155669  ;
 [A]DE1521248  (FUJITSU LTD);
 [A]US3881093  (ANDRE MARCEL, et al);
 [A]FR2350639  (BERGHAUS IONIT ANSTALT [LI]);
 [A]FR2371009  (COMMISSARIAT ENERGIE ATOMIQUE [FR]);
 [A]GB2021294  (LEYBOLD HERAEUS GMBH & CO KG);
 [A]GB2180081  (ION TECH LTD);
 [A]FR2595801  (INNOVATIQUE SA [FR])
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN, Band 20, Nr. 12, Mai 1978, Seiten 5379-5380, New York, US; P. SILANO: "Automatic pressure control of mixed gases"
 [A]  - PATENT ABSTRACTS OF JAPAN, Band 3, Nr. 123 (C-61), 16. Oktober 1979; & JP-A-54 103 790 (NIPPON DENKI) 15-08-1979, & JP54103790 A 00000000
 [A]  - PATENT ABSTRACTS OF JAPAN, Band 9, Nr. 324 (C-320)[2047], 19. Dezember 1985; & JP-A-60 155 669 (SHINKUU KIKAI) 15-08-1985, & JP60155669 A 00000000
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.