EP0370511 - Method of fabricating a photoplate [Right-click to bookmark this link] | |||
Former [1990/22] | Method of fabricating a photoplate and a photoplate fabricated by the same | ||
[1997/11] | Status | No opposition filed within time limit Status updated on 16.01.1998 Database last updated on 02.11.2024 | Most recent event Tooltip | 16.01.1998 | No opposition filed within time limit | published on 04.03.1998 [1998/10] | Applicant(s) | For all designated states Kabushiki Kaisha Toshiba 72, Horikawa-cho, Saiwai-ku Kawasaki-shi Kanagawa-ken 210-8572 / JP | [N/P] |
Former [1990/22] | For all designated states KABUSHIKI KAISHA TOSHIBA 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210, Tokyo / JP | Inventor(s) | 01 /
Yamamoto, Noboru 102 Dai-2 Green Haim 2-182 Tasukagoshi Saiwai-ku Kawasaki-shi kanagawa-ken / JP | 02 /
Matsuoka, Yasuo 102 Toshiba Kosugi Ryo 1-526 Kosugi-cho Nakahara-ku Kawasaki-shi Kanagawa-ken / JP | [1990/22] | Representative(s) | Lehn, Werner, et al Hoffmann Eitle, Patent- und Rechtsanwälte, Postfach 81 04 20 81904 München / DE | [N/P] |
Former [1990/22] | Lehn, Werner, Dipl.-Ing., et al Hoffmann, Eitle & Partner, Patentanwälte, Postfach 81 04 20 D-81904 München / DE | Application number, filing date | 89121678.0 | 23.11.1989 | [1990/22] | Priority number, date | JP19880296956 | 24.11.1988 Original published format: JP 29695688 | [1990/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0370511 | Date: | 30.05.1990 | Language: | EN | [1990/22] | Type: | A3 Search report | No.: | EP0370511 | Date: | 30.10.1991 | Language: | EN | [1991/44] | Type: | B1 Patent specification | No.: | EP0370511 | Date: | 12.03.1997 | Language: | EN | [1997/11] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 12.09.1991 | Classification | IPC: | G03F1/16, G03F1/14 | [1990/22] | CPC: |
G03F7/16 (EP);
H01L21/31 (KR);
G03F1/50 (EP);
H01L21/00 (KR)
| Designated contracting states | DE, FR, GB [1990/22] | Title | German: | Photomasken-Herstellungsverfahren | [1997/11] | English: | Method of fabricating a photoplate | [1997/11] | French: | Procédé de fabrication d'un photomasque | [1997/11] |
Former [1990/22] | Photomasken-Herstellungsverfahren und Photomaske | ||
Former [1990/22] | Method of fabricating a photoplate and a photoplate fabricated by the same | ||
Former [1990/22] | Procédé de fabrication d'un photomasque et photomasque fabriqué par ce procédé | Examination procedure | 23.11.1989 | Examination requested [1990/22] | 18.08.1994 | Despatch of a communication from the examining division (Time limit: M06) | 27.02.1995 | Reply to a communication from the examining division | 20.04.1995 | Despatch of a communication from the examining division (Time limit: M02) | 30.06.1995 | Reply to a communication from the examining division | 28.07.1995 | Despatch of a communication from the examining division (Time limit: M05) | 05.01.1996 | Reply to a communication from the examining division | 14.06.1996 | Despatch of communication of intention to grant (Approval: Yes) | 17.09.1996 | Communication of intention to grant the patent | 12.12.1996 | Fee for grant paid | 12.12.1996 | Fee for publishing/printing paid | Opposition(s) | 13.12.1997 | No opposition filed within time limit [1998/10] | Fees paid | Renewal fee | 11.11.1991 | Renewal fee patent year 03 | 09.10.1992 | Renewal fee patent year 04 | 08.11.1993 | Renewal fee patent year 05 | 15.11.1994 | Renewal fee patent year 06 | 09.11.1995 | Renewal fee patent year 07 | 11.11.1996 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JP5850739 ; | [Y]JP57128032 | [X] - PATENT ABSTRACTS OF JAPAN vol. 7, no. 136 (E-181)(1281) 14 June 1983, & JP-A-58 50739 (MITSUBISHI DENKI K.K.) 25 March 1983,, & JP5850739 A 19830325 | [Y] - PATENT ABSTRACTS OF JAPAN vol. 6, no. 226 (E-141)(1104) 11 November 1982, & JP-A-57 128032 (TOSHIBA KIKAI K.K.) 09 August 1982,, & JP57128032 A 19820809 |