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EP0333407
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EP About this file: EP0333407
| EP0333407 - Resist material and process for information of resist patterns [Right-click to bookmark this link] | Status | The application has been refused Status updated on 06.06.1997 Database last updated on 18.11.2024 | Most recent event Tooltip | 06.06.1997 | Refusal of application | published on 23.07.1997 [1997/30] | Applicant(s) | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi Kanagawa 211 / JP | [N/P] |
| Former [1989/38] | For all designated states FUJITSU LIMITED 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 / JP | Inventor(s) | 01 /
Abe, Naomichi 5-22-102, Kami-yoga 4-chome Setagaya-ku Tokyo 158 / JP | [1989/38] | Representative(s) | Silverman, Warren, et al Haseltine Lake & Co. Imperial House, 15-19 Kingsway London WC2B 6UD / GB | [N/P] |
| Former [1989/38] | Silverman, Warren, et al HASELTINE LAKE & CO. Hazlitt House 28 Southampton Buildings Chancery Lane London WC2A 1AT / GB | Application number, filing date | 89302448.9 | 13.03.1989 | [1989/38] | Priority number, date | JP19880059328 | 15.03.1988 Original published format: JP 5932888 | [1989/38] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0333407 | Date: | 20.09.1989 | Language: | EN | [1989/38] | Type: | A3 Search report | No.: | EP0333407 | Date: | 01.07.1992 | Language: | EN | [1992/27] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 12.05.1992 | Classification | IPC: | G03F7/038, G03F7/004 | [1992/27] | CPC: |
G03F7/0045 (EP,US);
G03F7/00 (KR);
G03F7/038 (EP,US)
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| Former IPC [1989/38] | G03F7/02 | Designated contracting states | DE, FR, GB [1989/38] | Title | German: | Resistmaterial und Verfahren zur Herstellung von Resistbildern | [1989/38] | English: | Resist material and process for information of resist patterns | [1989/38] | French: | Matériel formant réserve et procédé pour l'obtention d'un modèle formant réserve | [1989/38] | Examination procedure | 13.10.1992 | Examination requested [1992/50] | 25.01.1995 | Despatch of a communication from the examining division (Time limit: M06) | 24.07.1995 | Reply to a communication from the examining division | 17.08.1995 | Despatch of a communication from the examining division (Time limit: M06) | 10.01.1996 | Reply to a communication from the examining division | 08.02.1996 | Despatch of a communication from the examining division (Time limit: M04) | 25.03.1996 | Reply to a communication from the examining division | 30.08.1996 | Despatch of communication of intention to grant (Approval: ) | 24.02.1997 | Despatch of communication that the application is refused, reason: formalities examination [1997/30] | 06.03.1997 | Application refused, date of legal effect [1997/30] | Fees paid | Renewal fee | 07.03.1991 | Renewal fee patent year 03 | 04.03.1992 | Renewal fee patent year 04 | 11.03.1993 | Renewal fee patent year 05 | 11.03.1994 | Renewal fee patent year 06 | 06.03.1995 | Renewal fee patent year 07 | 26.03.1996 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 31.03.1997 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]GB501069 (HARRIS SEYBOLD POTTER CO); | [A]US4341859 (KEANE JOHN J, et al); | [A]US4657844 (SHU JING S [US], et al); | [A]US4610952 (CRIVELLO JAMES V [US]) |