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EP0406434
European procedure
Extract from the Register of European Patents
EP About this file: EP0406434
| EP0406434 - DRY-ETCHING METHOD [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 23.05.1997 Database last updated on 02.11.2024 | Most recent event Tooltip | 23.05.1997 | No opposition filed within time limit | published on 09.07.1997 [1997/28] | Applicant(s) | For all designated states KABUSHIKI KAISHA SHIBAURA SEISAKUSHO 1-12, Akasaka 1-Chome Minato-Ku Tokio-To / JP | [N/P] |
| Former [1994/07] | For all designated states KABUSHIKI KAISHA SHIBAURA SEISAKUSHO 1-12, Akasaka 1-Chome Minato-Ku Tokio-To / JP | ||
| Former [1991/02] | For all designated states KABUSHIKI KAISHA TOKUDA SEISAKUSHO 25-22, Sagamigaoka 6-chome Zama-shi Kanagawa 228 / JP | Inventor(s) | 01 /
NONAKA, Mikio, Kabushiki Kaiha Tokuda Seisakusho 25-22, Sagamigaoka 6-chome Zama-shi, Kanagawa 228 / JP | 02 /
HARA, Hiroyuki, Kabushiki Kaisha Tokuda Seisakusho 25-22, Sagamigaoka 6-chome Zama-shi, Kanagawa 228 / JP | [1991/14] |
| Former [1991/02] | 01 /
NONAKA, Mikio Kabushiki Kaisha Tokuda Seisakusho 25-22, Sagamigaoka 6-chome Zama-shi Kanagawa 228 / JP | ||
| 02 /
HARA, Hiroyuki Kabushiki Kaisha Tokuda Seisakusho 25-22, Sagamigaoka 6-chome Zama-shi Kanagawa 228 / JP | Representative(s) | Liesegang, Roland, et al Boehmert & Boehmert Anwaltspartnerschaft mbB Pettenkoferstrasse 22 80336 München / DE | [N/P] |
| Former [1994/07] | Liesegang, Roland, Dr.-Ing., et al FORRESTER & BOEHMERT Franz-Joseph-Strasse 38 D-80801 München / DE | ||
| Former [1991/02] | Münzhuber, Robert, Dipl.-Phys. c/o BOEHMERT & BOEHMERT Rumfordstrasse 10 D-8000 München 5 / DE | Application number, filing date | 89912656.9 | 17.11.1989 | [1991/02] | WO1989JP01174 | Priority number, date | JP19880291736 | 18.11.1988 Original published format: JP 29173688 | JP19890002461 | 09.01.1989 Original published format: JP 246189 | JP19890135189 | 29.05.1989 Original published format: JP 13518989 | [1991/14] |
| Former [1991/02] | JP19880291736 | 18.11.1988 | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9005994 | Date: | 31.05.1990 | Language: | EN | [1990/12] | Type: | A1 Application with search report | No.: | EP0406434 | Date: | 09.01.1991 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.05.1990 takes the place of the publication of the European patent application. | [1991/02] | Type: | B1 Patent specification | No.: | EP0406434 | Date: | 17.07.1996 | Language: | EN | [1996/29] | Search report(s) | International search report - published on: | JP | 31.05.1990 | (Supplementary) European search report - dispatched on: | EP | 28.03.1991 | Classification | IPC: | H01L21/302 | [1991/02] | CPC: |
H01L21/31116 (EP,US);
H01L21/302 (KR);
H01L21/32137 (EP,US)
| Designated contracting states | DE, FR, GB, IT [1991/02] | Title | German: | TROCKENÄTZVERFAHREN | [1991/02] | English: | DRY-ETCHING METHOD | [1991/02] | French: | PROCEDE DE GRAVURE PAR LA VOIE SECHE | [1991/02] | Entry into regional phase | 17.07.1990 | Translation filed | 27.07.1990 | National basic fee paid | 27.07.1990 | Search fee paid | 27.07.1990 | Designation fee(s) paid | 27.07.1990 | Examination fee paid | Examination procedure | 27.07.1990 | Examination requested [1991/02] | 05.07.1993 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time | 26.11.1993 | Despatch of a communication from the examining division (Time limit: M06) | 03.06.1994 | Reply to a communication from the examining division | 14.10.1994 | Despatch of a communication from the examining division (Time limit: M06) | 24.04.1995 | Reply to a communication from the examining division | 04.10.1995 | Despatch of communication of intention to grant (Approval: Yes) | 18.01.1996 | Communication of intention to grant the patent | 10.04.1996 | Fee for grant paid | 10.04.1996 | Fee for publishing/printing paid | Opposition(s) | 18.04.1997 | No opposition filed within time limit [1997/28] | Request for re-establishment of rights: | 03.09.1993 | Date of receipt | 05.10.1993 | Request accepted | Fees paid | Renewal fee | 30.10.1991 | Renewal fee patent year 03 | 03.09.1993 | Renewal fee patent year 04 | 08.11.1993 | Renewal fee patent year 05 | 15.11.1994 | Renewal fee patent year 06 | 09.11.1995 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 30.11.1992 | 04 M06 Fee paid on 03.09.1993 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]EP0001538 (IBM [US]); | [X]US4615764 (BOBBIO STEPHEN M [US], et al); | [X]EP0174249 (FUJITSU LTD [JP]); | [X]EP0106174 (HITACHI LTD [JP]) | [X] - IBM TECHNICAL DISCLOSURE BULLETIN, vol. 20, no. 2, July 1977, page 757, New York, US; J.W. COBURN: "Increasing the selectivity of the plasma etch rate of SiO2 relative to Si" | International search | [X]JPH05675573 ; | [Y]JPH05621330 ; | [Y]JPS61123142 (MATSUSHITA ELECTRIC IND CO LTD); | [Y]JPS57139927 (NIPPON ELECTRIC CO); | [Y]JPS61266584 (TOKUDA SEISAKUSHO); | [Y]JPS58150429 (HITACHI LTD) |