Cited in | Search | Type: | Patent literature | Publication No.: | US3933528
[X] ; | Type: | Patent literature | Publication No.: | US4780425
[Y] ; | Type: | Patent literature | Publication No.: | US3915766
[Y] ; | Type: | Patent literature | Publication No.: | FR2260186
[X] ; | Type: | Patent literature | Publication No.: | EP0007923
[X] ; | Type: | Patent literature | Publication No.: | EP0005164
[A] | Cited in | Examination | Type: | Non-patent literature | Publication information: | - Latest LSI Process Technology, April 25, 1984, published by the Industrial Board of Inquiry, Japan (relevant pages filed by the applicant with letter dated 2.1.95) |