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EP0416924
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EP About this file: EP0416924
| EP0416924 - Method of producing conductive members on a semiconductor surface [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 21.04.1993 Database last updated on 09.05.2025 | Most recent event Tooltip | 21.04.1993 | Application deemed to be withdrawn | published on 09.06.1993 [1993/23] | Applicant(s) | For all designated states GTE Laboratories Incorporated 1209 Orange Street Wilmington Delaware 01901 / US | [N/P] |
| Former [1991/11] | For all designated states GTE LABORATORIES INCORPORATED 1209 Orange Street Wilmington Delaware 01901 / US | Inventor(s) | 01 /
Lockwood, Harry F. 21 White Oak Road Waban, MA 02168 / US | 02 /
Tabasky, Marvin 11 Clinton Road Peabody, MA 01960 / US | 03 /
Stern, Margaret B. 177 Plympton Road Sudbury, MA 01776 / US | 04 /
Cataldo, Victor 12 Tomahawk Drive Wilmington, MA 01887 / US | [1991/11] | Representative(s) | Bubb, Antony John Allen, et al Wilson Gunn Chancery House, Chancery Lane London WC2A 1QU / GB | [N/P] |
| Former [1991/11] | Bubb, Antony John Allen, et al GEE & CO. Chancery House Chancery Lane London WC2A 1QU / GB | Application number, filing date | 90309770.7 | 06.09.1990 | [1991/11] | Priority number, date | US19890404237 | 07.09.1989 Original published format: US 404237 | [1991/11] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0416924 | Date: | 13.03.1991 | Language: | EN | [1991/11] | Type: | A3 Search report | No.: | EP0416924 | Date: | 11.03.1992 | Language: | EN | [1992/11] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 22.01.1992 | Classification | IPC: | H01L21/285, C23C16/04, H01L29/40 | [1992/11] | CPC: |
H10D30/0614 (EP,US);
H01L21/28575 (EP,US);
H01L21/28581 (EP,US);
H10D30/0616 (EP,US)
|
| Former IPC [1991/11] | H01L21/285 | Designated contracting states | DE, FR, GB, NL [1991/11] | Title | German: | Verfahren zum Herstellen von leitenden Elementen auf einer Halbleiteroberfläche | [1991/11] | English: | Method of producing conductive members on a semiconductor surface | [1991/11] | French: | Procédé de fabrication de membres conducteurs sur une surface semi-conductrice | [1991/11] | File destroyed: | 03.08.2001 | Examination procedure | 12.09.1992 | Application deemed to be withdrawn, date of legal effect [1993/23] | 14.01.1993 | Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time [1993/23] | Fees paid | Penalty fee | Penalty fee Rule 85b EPC 1973 | 22.10.1992 | M01 Not yet paid | Additional fee for renewal fee | 30.09.1992 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPS62114276 ; | [X]JPH01117071 ; | [X]DE2151127 ; | [X]WO8607491 (NCR CO [US]); | [X]WO8703741 (NCR CO [US]); | [X]EP0240309 (CANON KK [JP]) | [X] - PATENT ABSTRACTS OF JAPAN vol. 11, no. 325 (E-551) 22 October 1987& JP-A-62 114276 (OKI ELECTRIC IND. CO. LTD.) 26 May 1987, | [X] - APPLIED PHYSICS LETTERS. vol. 54, no. 17, 24 April 1989NEW YORK US pages 1672 - 1674; R.V. JOSHI et al.: "Novel self-aligned W/TiN/TiSi2 contact structure for very shallow junctions and interconnections" | [X] - PATENT ABSTRACTS OF JAPAN vol. 13, no. 356 (E-803) 09 August 1989& JP-A-01 117071 (FUJITSU LTD.) 09 May 1989, |