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Extract from the Register of European Patents

EP About this file: EP0388343

EP0388343 - Chemically amplified photoresist [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  23.05.1997
Database last updated on 22.08.2024
Most recent event   Tooltip23.05.1997No opposition filed within time limitpublished on 09.07.1997 [1997/28]
Applicant(s)For all designated states
International Business Machines Corporation
New Orchard Road
Armonk, NY 10504 / US
[N/P]
Former [1990/38]For all designated states
International Business Machines Corporation
Old Orchard Road
Armonk, N.Y. 10504 / US
Inventor(s)01 / Brunsvold, William Ross
22 Clover Hill Road
Poughkeepsie, N.Y. 12603 / US
02 / Knors, Christopher John
17E Alpine Drive
Wappingers Falls, N.Y. 12590 / US
03 / Kwong, Ranee Wai-Ling
31 Mina Drive
Wappingers Falls, N.Y. 12590 / US
04 / Miura, Steve Seiichi
97 Alda Drive
Poughkeepsie, N.Y. 12601 / US
05 / Montgomery, Melvin Warren
23 Manuche Drive
New Windsor, N.Y. 12550 / US
06 / Moreau, Wayne Martin
Lydia Drive
Wappingers Falls, N.Y. 12590 / US
07 / Sachdev, Harbans Singh
14 Tanglewood Drive
Wappingers Falls, N.Y. 12590 / US
[1990/38]
Representative(s)Klein, Daniel Jacques Henri
Compagnie IBM France Département de Propriété Intellectuelle
06610 La Gaude / FR
[N/P]
Former [1990/38]Klein, Daniel Jacques Henri
Compagnie IBM France Département de Propriété Intellectuelle
F-06610 La Gaude / FR
Application number, filing date90480016.602.02.1990
[1990/38]
Priority number, dateUS1989032284814.03.1989         Original published format: US 322848
[1990/38]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0388343
Date:19.09.1990
Language:EN
[1990/38]
Type: A3 Search report 
No.:EP0388343
Date:21.08.1991
Language:EN
[1991/34]
Type: B1 Patent specification 
No.:EP0388343
Date:17.07.1996
Language:EN
[1996/29]
Search report(s)(Supplementary) European search report - dispatched on:EP03.07.1991
ClassificationIPC:G03F7/039
[1990/38]
CPC:
G03F7/039 (EP,US); Y10S430/111 (EP,US); Y10S430/121 (EP,US);
Y10S430/122 (EP,US); Y10S430/126 (EP,US); Y10S430/127 (EP,US)
Designated contracting statesDE,   FR,   GB [1990/38]
TitleGerman:Chemisch amplifizierter Photolack[1990/38]
English:Chemically amplified photoresist[1990/38]
French:Photoréserve avec amplification chimique[1990/38]
Examination procedure13.12.1990Examination requested  [1991/06]
21.12.1992Despatch of a communication from the examining division (Time limit: M06)
29.06.1993Reply to a communication from the examining division
21.11.1994Despatch of a communication from the examining division (Time limit: M06)
10.05.1995Reply to a communication from the examining division
17.08.1995Despatch of communication of intention to grant (Approval: Yes)
10.01.1996Communication of intention to grant the patent
21.02.1996Fee for grant paid
21.02.1996Fee for publishing/printing paid
Opposition(s)18.04.1997No opposition filed within time limit [1997/28]
Fees paidRenewal fee
24.02.1992Renewal fee patent year 03
18.02.1993Renewal fee patent year 04
26.02.1994Renewal fee patent year 05
27.02.1995Renewal fee patent year 06
13.02.1996Renewal fee patent year 07
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Documents cited:Search[YD]US4371605  (RENNER CARL A);
 [Y]EP0102450  ;
 [A]US3782939  (BONHAM J, et al)
 [Y]  - IBM TECHNICAL DISCLOSURE BULLETIN. vol. 18, no. 6, 06 November 1975, NEW YORK US & KRISTOFF J.S: "PHOTORESIST ADDITIVE SENSITIZER"
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.