EP0434797 - DEVICE FOR COATING SUBSTRATES BY CATHODE SPUTTERING [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.09.1995 Database last updated on 10.07.2024 | Most recent event Tooltip | 19.06.2009 | Change - representative | published on 22.07.2009 [2009/30] | Applicant(s) | For all designated states Leyendecker, Toni Freunder Weg 52 D-52068 Aachen / DE | [1991/27] | Inventor(s) | 01 /
LEYENDECKER, Toni Freunder Weg 52 D-5100 Aachen / DE | 02 /
LEMMER, Oliver Bischofstrasse 3 D-5100 Aachen / DE | 03 /
ESSER, Stefan Kaiserstrasse 73a D-5102 Wütselen / DE | [1994/44] |
Former [1991/27] | 01 /
LEYENDECKER, Toni Freunder Weg 52 D-5100 Aachen / DE | ||
02 /
LEMMER, Oliver Bischofstra e 3 D-5100 Aachen / DE | |||
03 /
ESSER, Stefan Kaiserstra e 73a D-5102 Wütselen / DE | Representative(s) | Wenzel & Kalkoff Patentanwälte Martin-Schmeisser-Weg 3a-3b 44227 Dortmund / DE | [N/P] |
Former [2009/30] | Wenzel & Kalkoff Patentanwälte Martin-Schmeisser-Weg 3a-3b 44227 Dortmund / DE | ||
Former [1991/27] | Patentanwälte Wenzel & Kalkoff Ruhrstrasse 26 Postfach 2448 D-58414 Witten / DE | Application number, filing date | 90909702.4 | 22.06.1990 | [1991/27] | WO1990EP00999 | Priority number, date | DE19893920772 | 24.06.1989 Original published format: DE 3920772 | [1991/27] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO9100378 | Date: | 10.01.1991 | Language: | DE | [1991/02] | Type: | A1 Application with search report | No.: | EP0434797 | Date: | 03.07.1991 | Language: | DE | The application published by WIPO in one of the EPO official languages on 10.01.1991 takes the place of the publication of the European patent application. | [1991/27] | Type: | B1 Patent specification | No.: | EP0434797 | Date: | 02.11.1994 | Language: | DE | [1994/44] | Search report(s) | International search report - published on: | EP | 10.01.1991 | Classification | IPC: | C23C14/34, C23C14/38, H01J37/34 | [1991/27] | CPC: |
H01J37/3438 (EP);
C23C14/564 (EP);
H01J37/34 (EP);
H01J37/3447 (EP)
| Designated contracting states | AT, BE, CH, DE, DK, ES, FR, GB, IT, LI, LU, NL, SE [1991/27] | Title | German: | GERÄT ZUR BESCHICHTUNG VON SUBSTRATEN DURCH KATHODENZERSTÄUBUNG | [1991/27] | English: | DEVICE FOR COATING SUBSTRATES BY CATHODE SPUTTERING | [1991/27] | French: | APPAREIL D'ENDUCTION DE SUBSTRATS PAR PULVERISATION CATHODIQUE | [1991/27] | Entry into regional phase | 27.12.1990 | National basic fee paid | 27.12.1990 | Designation fee(s) paid | 27.12.1990 | Examination fee paid | Examination procedure | 27.12.1990 | Examination requested [1991/27] | 12.09.1992 | Despatch of a communication from the examining division (Time limit: M04) | 16.09.1992 | Despatch of a communication from the examining division (Time limit: M06) | 03.03.1993 | Reply to a communication from the examining division | 27.12.1993 | Despatch of communication of intention to grant (Approval: Yes) | 02.05.1994 | Communication of intention to grant the patent | 03.08.1994 | Fee for grant paid | 03.08.1994 | Fee for publishing/printing paid | Opposition(s) | 03.08.1995 | No opposition filed within time limit [1995/43] | Fees paid | Renewal fee | 30.06.1992 | Renewal fee patent year 03 | 30.06.1993 | Renewal fee patent year 04 | 24.06.1994 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | DE2148933 [ ] (COGAR CORP); | EP0003020 [ ]; | EP0150878 [ ] (PHILIPS PATENTVERWALTUNG [DE], et al) | Examination | - GLOW DISCHARGE PROCESSES, B. CHAPMAN, John Wiley and Sons 1980 Seiten 196-198. | - DÜNNSCHICHTTECHNOLOGIE, H.FREY UND G.KIENEL, VDJ-Verlag GmbH, Düsseldorf 1987, Seiten 108-113, 509-511. |