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EP0473067
European procedure
Extract from the Register of European Patents
EP About this file: EP0473067
| EP0473067 - Wafer processing reactor [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.11.1996 Database last updated on 12.07.2024 | Most recent event Tooltip | 08.11.1996 | No opposition filed within time limit | published on 27.12.1996 [1996/52] | Applicant(s) | For all designated states Applied Materials, Inc. P.O. Box 58039 Santa Clara, California 95052 / US | [N/P] |
| Former [1992/10] | For all designated states APPLIED MATERIALS INC. PO Box 58039 Santa Clara California 95052 / US | Inventor(s) | 01 /
Anderson, Roger N. 1824 Nestorita Way San Jose, CA 95124 / US | 02 /
Lindstrom, Paul R. 120 Hawks Peak Road Aptos, CA 95003 / US | 03 /
Johnson, Wayne 12019 S. Appaloosa Phoenix, AZ 85044 / US | [1996/01] |
| Former [1992/10] | 01 /
Anderson, Roger N. 1824 Nestorita Way San Jose, California 95124 / US | ||
| 02 /
Lindstrom, Paul R. 120 Hawks Peak Road Aptos, California 95003 / US | |||
| 03 /
Johnson, Wayne 12019 S. Appaloosa Phoenix, Arizona 85044 / US | Representative(s) | Kahler, Kurt Patentanwälte Kahler, Käck, Fiener Vorderer Anger 239 86899 Landsberg/Lech / DE | [N/P] |
| Former [1992/45] | Kahler, Kurt, Dipl.-Ing. Patentanwälte Kahler, Käck, Fiener & Sturm P.O. Box 12 49 D-87712 Mindelheim / DE | ||
| Former [1992/10] | Kahler, Kurt, Dipl.-Ing. Patentanwälte Kahler, Käck, Fiener & Sturm P.O. Box 12 49 D-87712 Mindelheim / DE | Application number, filing date | 91114081.2 | 22.08.1991 | [1992/10] | Priority number, date | US19900571957 | 23.08.1990 Original published format: US 571957 | [1992/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0473067 | Date: | 04.03.1992 | Language: | EN | [1992/10] | Type: | B1 Patent specification | No.: | EP0473067 | Date: | 03.01.1996 | Language: | EN | [1996/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 13.12.1991 | Classification | IPC: | C23C16/44, C23C16/42, C23C16/46, C23C16/48 | [1996/01] | CPC: |
C23C16/455 (EP)
|
| Former IPC [1992/10] | C23C16/44 | Designated contracting states | DE, GB [1992/10] | Title | German: | Reaktor zur Behandlung von Halbleiterscheiben. | [1996/01] | English: | Wafer processing reactor | [1992/10] | French: | Réacteur pour le traitement de plaquettes | [1992/10] |
| Former [1992/10] | Reaktor für Behandlung von Wafers | Miscellaneous | EPB 1996/01: Teilanmeldung 95106353.6 eingereicht am 22/08/91 | EPB 1996/01: Divisional application 95106353.6 filed on 22/08/91 | EPB 1996/01: Demande divisionnaire 95106353.6 déposée le 22/08/91 | Examination procedure | 14.08.1992 | Examination requested [1992/42] | 19.01.1994 | Despatch of a communication from the examining division (Time limit: M06) | 25.07.1994 | Reply to a communication from the examining division | 24.10.1994 | Despatch of communication of intention to grant (Approval: Yes) | 09.05.1995 | Communication of intention to grant the patent | 08.08.1995 | Fee for grant paid | 08.08.1995 | Fee for publishing/printing paid | Divisional application(s) | EP95106353.6 / EP0688887 | Opposition(s) | 05.10.1996 | No opposition filed within time limit [1996/52] | Fees paid | Renewal fee | 30.08.1993 | Renewal fee patent year 03 | 31.08.1994 | Renewal fee patent year 04 | 31.08.1995 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JP56013718 ; | [X]WO8912703 ; | [Y]WO9007019 ; | [A]EP0254654 | [A] - PATENT ABSTRACTS OF JAPAN vol. 5, no. 63 (E-54)(735) 28 April 1981 & JP-A-56 013 718 ( HITACHI SEISAKUSHO K.K. ) 10 February 1981, & JP56013718 A 19810210 |