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Extract from the Register of European Patents

EP About this file: EP0442630

EP0442630 - Combined scanning electron and scanning tunnelling microscope apparatus and method [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  24.10.1997
Database last updated on 11.01.2025
Most recent event   Tooltip24.10.1997No opposition filed within time limitpublished on 10.12.1997 [1997/50]
Applicant(s)For all designated states
Hitachi, Ltd.
6, Kanda Surugadai 4-chome
Chiyoda-ku
Tokyo 101 / JP
[N/P]
Former [1991/34]For all designated states
HITACHI, LTD.
6, Kanda Surugadai 4-chome
Chiyoda-ku, Tokyo 101 / JP
Inventor(s)01 / Yamada, Osamu
1938-13 Tsuda
Katsuta-shi, Ibaraki 312 / JP
02 / Hazaki, Eiichi
14-27 Kandatsu chuo-2-chome
Tsuchiura-shi, Ibaraki 300 / JP
03 / Nakaizumi, Yasushi
2032-35 Tsuda
Katsuta-shi, Ibaraki 312 / JP
[1991/34]
Representative(s)Calderbank, Thomas Roger, et al
Mewburn Ellis LLP
City Tower
40 Basinghall Street
London EC2V 5DE / GB
[N/P]
Former [1991/34]Calderbank, Thomas Roger, et al
MEWBURN ELLIS York House 23 Kingsway
London WC2B 6HP / GB
Application number, filing date91300656.529.01.1991
[1991/34]
Priority number, dateJP1990003114209.02.1990         Original published format: JP 3114290
[1991/34]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0442630
Date:21.08.1991
Language:EN
[1991/34]
Type: A3 Search report 
No.:EP0442630
Date:15.01.1992
Language:EN
[1992/03]
Type: B1 Patent specification 
No.:EP0442630
Date:18.12.1996
Language:EN
[1996/51]
Search report(s)(Supplementary) European search report - dispatched on:EP27.11.1991
ClassificationIPC:H01J37/28, G01N27/00
[1991/34]
CPC:
G01Q30/02 (EP,US); B82Y35/00 (US); G01Q10/06 (EP,US);
G01Q30/04 (EP,US); G01Q60/16 (EP,US); H01J37/28 (EP,US);
Y10S977/861 (EP,US) (-)
Designated contracting statesDE,   GB [1991/34]
TitleGerman:In einem Gerät zusammengefügtes Rasterelektronenmikroskop und Rastertunnelmikroskop und Verfahren[1991/34]
English:Combined scanning electron and scanning tunnelling microscope apparatus and method[1991/34]
French:Appareil combinant un microscope électronique à balayage et un microscope à balayage à effet tunnel et méthode[1991/34]
Examination procedure20.03.1991Examination requested  [1991/34]
16.12.1994Despatch of a communication from the examining division (Time limit: M04)
10.03.1995Reply to a communication from the examining division
19.02.1996Despatch of communication of intention to grant (Approval: Yes)
24.06.1996Communication of intention to grant the patent
16.09.1996Fee for grant paid
16.09.1996Fee for publishing/printing paid
Opposition(s)19.09.1997No opposition filed within time limit [1997/50]
Fees paidRenewal fee
22.01.1993Renewal fee patent year 03
21.01.1994Renewal fee patent year 04
23.01.1995Renewal fee patent year 05
23.01.1996Renewal fee patent year 06
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Documents cited:Search[A]GB2197752  (JAPAN RES DEV CORP, et al);
 [A]EP0110301  (TOKYO SHIBAURA ELECTRIC CO [JP])
 [A]  - REVIEW OF SCIENTIFIC INSTRUMENTS. vol. 59, no. 8, 1988, NEW YORK US pages 1286 - 1289; L. VAZQUEZ ET AL.: 'COMBINATION OF STM WITH SEM'
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.