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Extract from the Register of European Patents

EP About this file: EP0521078

EP0521078 - AN IMPROVED HOT FILAMENT CHEMICAL VAPOR DEPOSITION REACTOR [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.04.1997
Database last updated on 16.07.2024
Most recent event   Tooltip04.04.1997No opposition filed within time limitpublished on 21.05.1997 [1997/21]
Applicant(s)For all designated states
DIAMONEX, INCORPORATED
7150 Windsor Drive
Allentown, PA 18106-9328 / US
[1993/01]
Inventor(s)01 / GARG, Diwakar
2815 Whitemarsh Place
Macungie, PA 18062 / US
02 / TSAI, Wilman
740 Stendhal Lane
Cupertino, CA 95014 / US
03 / IAMPIETRO, Robert, L.
210 South Fourth Street
Emmaus, PA 18049 / US
04 / KIMOCK, Fred, M.
2961 Magnolia Circle
Macungie, PA 18062 / US
05 / KELLY, C., Michael
39 Oak Lane
Berwyn, PA 19312 / US
[1993/01]
Representative(s)Bowles, Sharon Margaret, et al
BOWLES HORTON
Felden House
Dower Mews
High Street
Berkhamsted Hertfordshire HP4 2BL / GB
[N/P]
Former [1993/01]Bowles, Sharon Margaret, et al
BOWLES HORTON Felden House Dower Mews High Street
Berkhamsted Hertfordshire HP4 2BL / GB
Application number, filing date91906869.213.03.1991
[1993/01]
WO1991US01698
Priority number, dateUS1990049715920.03.1990         Original published format: US 497159
[1993/01]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO9114798
Date:03.10.1991
Language:EN
[1991/23]
Type: A1 Application with search report 
No.:EP0521078
Date:07.01.1993
Language:EN
The application published by WIPO in one of the EPO official languages on 03.10.1991 takes the place of the publication of the European patent application.
[1993/01]
Type: B1 Patent specification 
No.:EP0521078
Date:22.05.1996
Language:EN
[1996/21]
Search report(s)International search report - published on:US03.10.1991
(Supplementary) European search report - dispatched on:EP14.07.1994
ClassificationIPC:C23C16/26
[1993/01]
CPC:
C23C16/45565 (EP); C23C16/271 (EP); C23C16/455 (EP);
C23C16/45568 (EP); C23C16/458 (EP)
Designated contracting statesAT,   BE,   CH,   DE,   DK,   FR,   GB,   IT,   LI,   LU,   NL,   SE [1993/01]
TitleGerman:VERBESSERTE GLÜHFILAMENT-CVD-ANLAGE[1993/01]
English:AN IMPROVED HOT FILAMENT CHEMICAL VAPOR DEPOSITION REACTOR[1993/01]
French:REACTEUR AMELIORE DE DEPOSITION EN PHASE GAZEUSE POUR PROCEDE CHIMIQUE COMPRENANT UN FILAMENT CHAUD[1993/01]
Entry into regional phase09.10.1992National basic fee paid 
09.10.1992Search fee paid 
09.10.1992Designation fee(s) paid 
09.10.1992Examination fee paid 
Examination procedure08.10.1991Request for preliminary examination filed
International Preliminary Examining Authority: DE
09.10.1992Examination requested  [1993/01]
20.02.1995Despatch of a communication from the examining division (Time limit: M04)
14.06.1995Reply to a communication from the examining division
12.07.1995Despatch of communication of intention to grant (Approval: Yes)
31.08.1995Communication of intention to grant the patent
07.11.1995Fee for grant paid
07.11.1995Fee for publishing/printing paid
Opposition(s)25.02.1997No opposition filed within time limit [1997/21]
Fees paidRenewal fee
24.02.1993Renewal fee patent year 03
04.03.1994Renewal fee patent year 04
11.03.1995Renewal fee patent year 05
15.03.1996Renewal fee patent year 06
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search   [ ] - No further relevant documents disclosed
International search[Y]JPS58190030  (KOKUSAI ELECTRIC CO LTD);
 [Y]JPS5921026  (HITACHI LTD);
 [Y]JPS5943861  (ULVAC CORP)
 [Y]  - Journal of the American Chemical Society, Vol. 72, No. 2, February 1989, KARL E. SPEAR "Diamond-Ceramic Coating of the Future", pages 171-191, see figure 2.
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.