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Extract from the Register of European Patents

EP About this file: EP0535540

EP0535540 - Etching process for aluminium-containing coatings [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  08.08.1995
Database last updated on 01.01.2025
Most recent event   Tooltip08.08.1995Application deemed to be withdrawnpublished on 27.09.1995 [1995/39]
Applicant(s)For all designated states
SIEMENS AKTIENGESELLSCHAFT
Werner-von-Siemens-Str. 1
DE-80333 München / DE
[N/P]
Former [1993/14]For all designated states
SIEMENS AKTIENGESELLSCHAFT
Wittelsbacherplatz 2
D-80333 München / DE
Inventor(s)01 / Grewal, Virinder, Dr.
9 Laurel Court
Fishkill, N.Y. 12524 / US
02 / Schwarzl, Siegfried, Dr.
Josef-Kyreinstrasse 11b
W-8011 Neubiberg / DE
[1993/14]
Application number, filing date92116389.524.09.1992
[1993/14]
Priority number, dateDE1991413283802.10.1991         Original published format: DE 4132838
[1993/14]
Filing languageDE
Procedural languageDE
PublicationType: A2 Application without search report 
No.:EP0535540
Date:07.04.1993
Language:DE
[1993/14]
Type: A3 Search report 
No.:EP0535540
Date:19.10.1994
Language:DE
[1994/42]
Search report(s)(Supplementary) European search report - dispatched on:EP31.08.1994
ClassificationIPC:C23F4/00, H01L21/321
[1993/14]
CPC:
H01L21/32136 (EP); C23F4/00 (EP)
Designated contracting statesBE,   DE,   FR,   GB,   IT [1993/14]
TitleGerman:Verfahren zum Ätzen einer Al-haltigen Schicht[1993/14]
English:Etching process for aluminium-containing coatings[1993/14]
French:Procédé de décapage de couches contenant de l'aluminium[1993/14]
File destroyed:07.09.2001
Examination procedure31.03.1995Application deemed to be withdrawn, date of legal effect  [1995/39]
04.05.1995Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [1995/39]
Fees paidPenalty fee
Additional fee for renewal fee
30.09.199403   M06   Not yet paid
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]DE3940083  (SIEMENS AG) [A] 1,2,4-7,9 * the whole document *;
 [A]FR2312114  (INTERNATIONAL BUSINESS MACHINES CORPORATION) [A] 1,2,5,7-9 * page 1, line 1 - page 10, line 38; claims 7-13 * * page 12, line 28 - page 14, line 26 *;
 [D]US3994793  (J. M. HARVILCHUCK ET AL.);
 [A]DE4105103  (MITSUBISHI DENKI K.K.) [A] 1,3-6,9 * the whole document *;
 [A]EP0427327  (N. V. PHILIPS GLOEILAMPENFABRIEKEN) [A] 1,5,6 * the whole document *;
 [A]EP0076860  (HITACHI LTD.) [A] 1,2,5,9 * the whole document *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.