-
EP0536752
European procedure
Extract from the Register of European Patents
EP About this file: EP0536752
| EP0536752 - Process for cleaning integrated circuits during the fabrication [Right-click to bookmark this link] | |||
| Former [1993/15] | Cleaning agents used during the fabrication of integrated circuits and associated process | ||
| [1995/51] | Status | No opposition filed within time limit Status updated on 25.10.1996 Database last updated on 18.11.2024 | Most recent event Tooltip | 25.10.1996 | No opposition filed within time limit | published on 11.12.1996 [1996/50] | Applicant(s) | For all designated states AIR PRODUCTS AND CHEMICALS, INC. 7201 Hamilton Boulevard Allentown, PA 18195-1501 / US | [1993/15] | Inventor(s) | 01 /
Roberts, David Allen 2753 Levante Street Carlsbad, CA 92009 / US | 02 /
Ivankovits, John Christopher 238 S. 13th Street Allentown, PA 18102 / US | 03 /
Bohling, David Arthur 2690 Mountain View Circle Emmaus, PA 18049 / US | [1993/15] | Representative(s) | SSM Sandmair Patentanwälte Rechtsanwalt Partnerschaft mbB Joseph-Wild-Straße 20 81829 München / DE | [N/P] |
| Former [1993/15] | Schwabe - Sandmair - Marx Stuntzstrasse 16 D-81677 München / DE | Application number, filing date | 92117207.8 | 08.10.1992 | [1993/15] | Priority number, date | US19910777818 | 11.10.1991 Original published format: US 777818 | [1993/15] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0536752 | Date: | 14.04.1993 | Language: | EN | [1993/15] | Type: | A3 Search report | No.: | EP0536752 | Date: | 26.05.1993 | Language: | EN | [1993/21] | Type: | B1 Patent specification | No.: | EP0536752 | Date: | 20.12.1995 | Language: | EN | [1995/51] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.04.1993 | Classification | IPC: | C11D7/26, H01L21/306 | [1993/21] | CPC: |
H01L21/02046 (EP,US);
C11D3/22 (KR);
C11D7/02 (EP,US);
C11D7/08 (EP,US);
C11D7/265 (EP,US);
C23F1/12 (EP);
C23G5/00 (EP,US);
H01L21/02085 (EP,US);
H01L21/3105 (EP,US);
C11D2111/22 (EP,US)
(-)
|
| Former IPC [1993/15] | C11D3/20, H05K3/00, C11D7/08 | Designated contracting states | DE, FR, GB, IT, NL [1993/15] | Title | German: | Verfahren zur Reinigung integrierter Schaltkreise während die Herstellung | [1995/51] | English: | Process for cleaning integrated circuits during the fabrication | [1995/51] | French: | Procédé pour nettoyer des circuits intégrés pendant la fabrication | [1995/51] |
| Former [1993/15] | Reinigungsmittel, die während der Herstellung integrierter Schaltkreise verwendet werden und damit verbundenes Verfahren | ||
| Former [1993/15] | Cleaning agents used during the fabrication of integrated circuits and associated process | ||
| Former [1993/15] | Produits nettoyants utilisés pendant la fabrication des circuits intégrés et procédé associé avec cette utilisation | Examination procedure | 02.08.1993 | Examination requested [1993/40] | 08.11.1993 | Despatch of a communication from the examining division (Time limit: M04) | 24.02.1994 | Reply to a communication from the examining division | 22.09.1994 | Despatch of a communication from the examining division (Time limit: M02) | 18.10.1994 | Reply to a communication from the examining division | 20.02.1995 | Despatch of communication of intention to grant (Approval: Yes) | 02.06.1995 | Communication of intention to grant the patent | 09.08.1995 | Fee for grant paid | 09.08.1995 | Fee for publishing/printing paid | Opposition(s) | 21.09.1996 | No opposition filed within time limit [1996/50] | Fees paid | Renewal fee | 12.10.1994 | Renewal fee patent year 03 | 09.10.1995 | Renewal fee patent year 04 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JP61004232 ; | [X]JP54038355 ; | [X]SU604648 ; | [X]DE1302175 ; | [X]FR2445623 (MATSUSHITA ELECTRIC IND CO LTD [JP]); | [XP]EP0501492 (OKMETIC OY [FI]) | [X] - DERWENT JAPANESE PATENTS REPORT Derwent Publications Ltd., London, GB; & JP-A-61 004 232 (NIPPON DENKI KK) 24 May 1986, & JP61004232 A 19860524 | [X] - DATABASE WPI Derwent Publications Ltd., London, GB; AN 79-34226B & JP-A-54 038 355 (FUJI ELECTRIC MFG KK) 22 March 1979, & JP54038355 A 19790322 | [X] - DATABASE WPI Derwent Publications Ltd., London, GB; AN 79-23527B & SU-A-604 648 (S K MITKIN) 27 April 1978, & SU604648 A 00000000 |