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EP0496614
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EP About this file: EP0496614
| EP0496614 - Method for forming contact hole in process of manufacturing semiconductor device [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 04.05.1995 Database last updated on 03.09.2024 | Most recent event Tooltip | 04.05.1995 | Application deemed to be withdrawn | published on 28.06.1995 [1995/26] | Applicant(s) | For all designated states NEC Corporation 7-1, Shiba 5-chome Minato-ku Tokyo 108-8001 / JP | [N/P] |
| Former [1992/31] | For all designated states NEC CORPORATION 7-1, Shiba 5-chome Minato-ku Tokyo / JP | Inventor(s) | 01 /
Nakano, Eiichi, c/o NEC Corporation 7-1, Shiba 5-chome, Minato-ku Tokyo / JP | [1992/31] | Representative(s) | Moir, Michael Christopher, et al Mathys & Squire LLP 120 Holborn London EC1N 2SQ / GB | [N/P] |
| Former [1992/31] | Moir, Michael Christopher, et al Mathys & Squire 100 Grays Inn Road London WC1X 8AL / GB | Application number, filing date | 92300574.8 | 23.01.1992 | [1992/31] | Priority number, date | JP19910006146 | 23.01.1991 Original published format: JP 614691 | [1992/31] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0496614 | Date: | 29.07.1992 | Language: | EN | [1992/31] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 07.05.1992 | Classification | IPC: | H01L21/3105, H01L21/60, H01L21/90 | [1992/31] | CPC: |
H01L21/31116 (EP);
H01L21/76802 (EP);
H01L23/485 (EP);
H01L2924/0002 (EP)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP)
| Designated contracting states | DE, FR, GB [1992/31] | Title | German: | Verfahren zur Erzeugung von Kontaktöffnungen während der Herstellung von Halbleiterbauelementen | [1992/31] | English: | Method for forming contact hole in process of manufacturing semiconductor device | [1992/31] | French: | Procéde pour la formation d'ouvertures de contact lors de la fabrication de dispositif à semiconducteur | [1992/31] | File destroyed: | 03.03.2001 | Examination procedure | 10.02.1992 | Examination requested [1992/31] | 01.08.1994 | Despatch of a communication from the examining division (Time limit: M04) | 12.12.1994 | Application deemed to be withdrawn, date of legal effect [1995/26] | 18.01.1995 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [1995/26] | Fees paid | Renewal fee | 22.01.1994 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.01.1995 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]GB2023342 ; | [A]EP0280276 ; | [A]EP0376479 |