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Extract from the Register of European Patents

EP About this file: EP0526244

EP0526244 - Method of forming a polysilicon buried contact [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  03.11.2000
Database last updated on 18.11.2024
Most recent event   Tooltip03.11.2000No opposition filed within time limitpublished on 20.12.2000 [2000/51]
Applicant(s)For all designated states
STMicroelectronics, Inc.
1310 Electronics Drive
Carrollton, TX 75006-5039 / US
[1999/08]
Former [1993/05]For all designated states
SGS-THOMSON MICROELECTRONICS, INC.
1310 Electronics Drive
Carrollton Texas 75006 / US
Inventor(s)01 / Kalnitsky, Alexander
6651 Clearhaven Circle
Dallas, Texas 75248 / US
[1993/05]
Representative(s)Palmer, Roger, et al
PAGE, WHITE & FARRER 54 Doughty Street
London WC1N 2LS / GB
[1993/05]
Application number, filing date92307018.930.07.1992
[1993/05]
Priority number, dateUS1991073847431.07.1991         Original published format: US 738474
[1993/05]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0526244
Date:03.02.1993
Language:EN
[1993/05]
Type: A3 Search report 
No.:EP0526244
Date:18.08.1993
Language:EN
[1993/33]
Type: B1 Patent specification 
No.:EP0526244
Date:05.01.2000
Language:EN
[2000/01]
Search report(s)(Supplementary) European search report - dispatched on:EP29.06.1993
ClassificationIPC:H01L21/74
[1993/05]
CPC:
H01L21/743 (EP,US)
Designated contracting statesDE,   FR,   GB,   IT [1993/05]
TitleGerman:Verfahren zur Herstellung eines vergrabenen Kontaktes aus Polysilizium[1993/05]
English:Method of forming a polysilicon buried contact[1993/05]
French:Procédé de formation d'un contact enterré en silicium polycristallin[1993/05]
Examination procedure11.02.1994Examination requested  [1994/15]
01.06.1995Despatch of a communication from the examining division (Time limit: M06)
11.12.1995Reply to a communication from the examining division
21.05.1996Despatch of a communication from the examining division (Time limit: M06)
02.12.1996Reply to a communication from the examining division
15.05.1997Despatch of a communication from the examining division (Time limit: M06)
29.12.1997Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
03.03.1998Reply to a communication from the examining division
25.03.1999Despatch of communication of intention to grant (Approval: Yes)
02.07.1999Communication of intention to grant the patent
25.09.1999Fee for grant paid
25.09.1999Fee for publishing/printing paid
Divisional application(s)EP98201812.9  / EP0877420
Opposition(s)06.10.2000No opposition filed within time limit [2000/51]
Request for further processing for:03.03.1998Request for further processing filed
03.03.1998Full payment received (date of receipt of payment)
Request granted
18.03.1998Decision despatched
Fees paidRenewal fee
07.07.1994Renewal fee patent year 03
08.05.1995Renewal fee patent year 04
16.07.1996Renewal fee patent year 05
29.07.1997Renewal fee patent year 06
21.07.1998Renewal fee patent year 07
28.07.1999Renewal fee patent year 08
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Documents cited:Search[A]EP0209794  (FUJITSU LTD [JP]);
 [A]US4413402  (ERB DARRELL M [US]);
 [A]US4033026  (PASHLEY RICHARD D);
 [A]US4657628  (HOLLOWAY THOMAS C [US], et al);
 [A]US4187602  (MCELROY DAVID J [US])
 [Y]  - IBM TECHNICAL DISCLOSURE BULLETIN. vol. 25, no. 8, January 1983, NEW YORK US pages 4425 - 4426 R. C. DOCKERTY
 [Y]  - IBM TECHNICAL DISCLOSURE BULLETIN. vol. 25, no. 8, January 1983, NEW YORK US pages 4067 - 4068 A. EDENFELD ET AL
 [Y]  - HEWLETT-PACKARD JOURNAL vol. 33, no. 10, October 1982, AMSTELVEEN NL pages 21 - 27 HORNG-SEN FU ET AL
 [A]  - IBM TECHNICAL DISCLOSURE BULLETIN. vol. 24, no. 7B, December 1981, NEW YORK US pages 3696 - 3697 G. J. HU ET AL
 [A]  - PHILIPS JOURNAL OF RESEARCH vol. 44, no. 2/3, 28 July 1989, EINDHOVEN NL pages 257 - 291 K. OSINSKI ET AL
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.