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EP0569467
European procedure
Extract from the Register of European Patents
EP About this file: EP0569467
| EP0569467 - TARGET FOR CATHODE SPUTTERING [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 17.07.1998 Database last updated on 28.03.2026 | Most recent event Tooltip | 17.07.1998 | No opposition filed within time limit | published on 02.09.1998 [1998/36] | Applicant(s) | For all designated states MATERIALS RESEARCH CORPORATION Route 303 Orangeburg New York 10962 / US | [N/P] |
| Former [1993/46] | For all designated states MATERIALS RESEARCH CORPORATION Route 303 Orangeburg New York 10962 / US | Inventor(s) | 01 /
MARX, Daniel R. 16 Thurmont Road West Caldwell, NJ 07006 / US | 02 /
HURWITT, Steven D. 150 Pascack Road Park Ridge, NJ 07656 / US | [1993/46] | Representative(s) | Findlay, Alice Rosemary, et al Marks & Clerk LLP 90 Long Acre London WC2E 9RA / GB | [N/P] |
| Former [1993/46] | Findlay, Alice Rosemary, et al Lloyd Wise, Tregear & Co. Norman House 105-109 Strand London WC2R 0AE / GB | Application number, filing date | 92904520.1 | 18.11.1991 | [1993/46] | WO1991US08584 | Priority number, date | US19910647288 | 28.01.1991 Original published format: US 647288 | [1993/46] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9213115 | Date: | 06.08.1992 | Language: | EN | [1992/21] | Type: | A1 Application with search report | No.: | EP0569467 | Date: | 18.11.1993 | Language: | EN | The application published by WIPO in one of the EPO official languages on 06.08.1992 takes the place of the publication of the European patent application. | [1993/46] | Type: | B1 Patent specification | No.: | EP0569467 | Date: | 10.09.1997 | Language: | EN | [1997/37] | Search report(s) | International search report - published on: | EP | 06.08.1992 | Classification | IPC: | C23C14/34, H01J37/34 | [1993/46] | CPC: |
H01J37/3435 (EP,US);
C23C14/3407 (EP,US);
H01J37/3423 (EP,US)
| Designated contracting states | BE, CH, DE, FR, GB, IT, LI, LU, NL, SE [1993/46] | Title | German: | TARGET FÜR KATHODENZERSTÄUBUNG | [1993/46] | English: | TARGET FOR CATHODE SPUTTERING | [1993/46] | French: | CIBLE POR PULVERISATION CATHODIQUE | [1993/46] | Entry into regional phase | 01.07.1993 | National basic fee paid | 01.07.1993 | Designation fee(s) paid | 01.07.1993 | Examination fee paid | Examination procedure | 28.08.1992 | Request for preliminary examination filed International Preliminary Examining Authority: DE | 01.07.1993 | Examination requested [1993/46] | 23.11.1994 | Despatch of a communication from the examining division (Time limit: M04) | 20.02.1995 | Reply to a communication from the examining division | 23.08.1995 | Despatch of a communication from the examining division (Time limit: M04) | 21.12.1995 | Reply to a communication from the examining division | 28.10.1996 | Despatch of communication of intention to grant (Approval: Yes) | 13.03.1997 | Communication of intention to grant the patent | 04.06.1997 | Fee for grant paid | 04.06.1997 | Fee for publishing/printing paid | Opposition(s) | 11.06.1998 | No opposition filed within time limit [1998/36] | Fees paid | Renewal fee | 08.11.1993 | Renewal fee patent year 03 | 15.11.1994 | Renewal fee patent year 04 | 09.11.1995 | Renewal fee patent year 05 | 28.10.1996 | Renewal fee patent year 06 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [X] JP63083263 | [A] JP63235471 | [A] JP60200962 | JP1052065 | [X] PATENT ABSTRACTS OF JAPAN vol. 12, no. 312 (C-523)(3159) 24 August 1988 & JP,A,63 083 263 ( TOKYO ELECTRON LTD. ) 13 April 1988 [X] | [A] PATENT ABSTRACTS OF JAPAN vol. 13, no. 39 (C-563)(3387) 27 January 1989 & JP,A,63 235 471 ( NEC CORP. ) 30 September 1988 [A] | [A] PATENT ABSTRACTS OF JAPAN vol. 10, no. 63 (C-332)(2120) 13 March 1986 & JP,A,60 200 962 ( HITACHI SEISAKUSHO KK. ) 11 October 1985 [A] | PATENT ABSTRACTS OF JAPAN vol. 13, no. 241 (C-604)(3589) 6 June 1989 & JP,A,1 052 065 ( MATSUSHITA ELECTRIC IND CO LTD ) 28 February 1989 |