EP0584233 - Submicron tip structure with opposed tips [Right-click to bookmark this link] | |||
Former [1994/09] | METHODS OF FABRICATING INTEGRATED, ALIGNED TUNNELING TIP PAIRS | ||
[1998/22] | Status | No opposition filed within time limit Status updated on 21.01.2000 Database last updated on 30.07.2024 | Most recent event Tooltip | 07.12.2007 | Lapse of the patent in a contracting state New state(s): IT | published on 09.01.2008 [2008/02] | Applicant(s) | For all designated states CORNELL RESEARCH FOUNDATION, INC. 20 Thornwood Drive, Suite 105 Ithaca, NY 14850 / US | [N/P] |
Former [1994/09] | For all designated states CORNELL RESEARCH FOUNDATION, INC. 20 Thornwood Drive, Suite 105 Ithaca, NY 14850 / US | Inventor(s) | 01 /
ARNEY, Susanne, Christine c/o AT&T Bell Laborator. 600 Mountain Avenue 1C258 Murray Hill, New Jersey 07974 / US | 02 /
MACDONALD, Noel, C. 515 Highland Road Ithaca, NY 14850 / US | 03 /
YAO, Jun, Jason 200 Lower Creek Road 14 Ithaca, NY 14850 / US | [1996/11] |
Former [1994/09] | 01 /
ARNEY, Susanne, Christine 301 East Maple Avenue D-9 Ithaca, NY 14850 / US | ||
02 /
MACDONALD, Noel, C. 515 Highland Road Ithaca, NY 14850 / US | |||
03 /
YAO, Jun, Jason 200 Lower Creek Road 14 Ithaca, NY 14850 / US | Representative(s) | Weisert, Annekäte Patentanwälte Kraus & Weisert Thomas-Wimmer-Ring 15 80539 München / DE | [N/P] |
Former [1994/09] | Weisert, Annekäte, Dipl.-Ing. Dr.-Ing. Patentanwälte Kraus Weisert & Partner Thomas-Wimmer-Ring 15 D-80539 München / DE | Application number, filing date | 92912228.1 | 12.05.1992 | [1994/09] | WO1992US03917 | Priority number, date | US19910699390 | 14.05.1991 Original published format: US 699390 | US19920868138 | 14.04.1992 Original published format: US 868138 | [1994/09] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9220842 | Date: | 26.11.1992 | Language: | EN | [1992/29] | Type: | A1 Application with search report | No.: | EP0584233 | Date: | 02.03.1994 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.11.1992 takes the place of the publication of the European patent application. | [1994/09] | Type: | B1 Patent specification | No.: | EP0584233 | Date: | 17.03.1999 | Language: | EN | [1999/11] | Search report(s) | International search report - published on: | US | 26.11.1992 | (Supplementary) European search report - dispatched on: | EP | 16.08.1996 | Classification | IPC: | H01J37/063, G01B7/34, G01N27/00, H02N1/00 | [1996/40] | CPC: |
H02N1/008 (EP,US);
B82Y35/00 (US);
G01Q20/04 (EP,US);
G01Q60/16 (EP,US);
Y10S977/874 (EP,US)
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Former IPC [1994/09] | H01J37/063 | Designated contracting states | AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LI, LU, MC, NL, SE [1994/09] | Title | German: | Submikron Spitzenanordnung mit gegenüberliegenden Spitzen | [1998/22] | English: | Submicron tip structure with opposed tips | [1998/22] | French: | Arrangement des pointes avec des pointes opposées | [1998/22] |
Former [1994/09] | VERFAHREN ZUR HERSTELLUNG INTEGRIERTER, IN REIHEN GEORDNETER TUNNEL-EFFEKT SPITZENPAAREN | ||
Former [1994/09] | METHODS OF FABRICATING INTEGRATED, ALIGNED TUNNELING TIP PAIRS | ||
Former [1994/09] | PROCEDE PERMETTANT DE FABRIQUER DES PAIRES DE POINTES DE SONDE INTEGREES ET ALIGNEES FORMANT DES TUNNELS D'ELECTRONS | Entry into regional phase | 04.11.1993 | National basic fee paid | 04.11.1993 | Search fee paid | 04.11.1993 | Designation fee(s) paid | 04.11.1993 | Examination fee paid | Examination procedure | 10.12.1992 | Request for preliminary examination filed International Preliminary Examining Authority: DE | 04.11.1993 | Examination requested [1994/09] | 23.12.1996 | Despatch of a communication from the examining division (Time limit: M06) | 06.06.1997 | Reply to a communication from the examining division | 29.07.1997 | Despatch of a communication from the examining division (Time limit: M06) | 02.02.1998 | Reply to a communication from the examining division | 07.05.1998 | Despatch of communication of intention to grant (Approval: No) | 07.09.1998 | Despatch of communication of intention to grant (Approval: later approval) | 15.09.1998 | Communication of intention to grant the patent | 15.12.1998 | Fee for grant paid | 15.12.1998 | Fee for publishing/printing paid | Divisional application(s) | EP98116809.9 / EP0907076 | Opposition(s) | 18.12.1999 | No opposition filed within time limit [2000/10] | Fees paid | Renewal fee | 17.05.1994 | Renewal fee patent year 03 | 11.05.1995 | Renewal fee patent year 04 | 06.05.1996 | Renewal fee patent year 05 | 07.05.1997 | Renewal fee patent year 06 | 11.05.1998 | Renewal fee patent year 07 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 17.03.1999 | BE | 17.03.1999 | CH | 17.03.1999 | ES | 17.03.1999 | GR | 17.03.1999 | IT | 17.03.1999 | LI | 17.03.1999 | NL | 17.03.1999 | SE | 17.03.1999 | LU | 12.05.1999 | DK | 17.06.1999 | MC | 30.11.1999 | [2008/02] |
Former [2004/39] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
ES | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
LU | 12.05.1999 | ||
DK | 17.06.1999 | ||
MC | 30.11.1999 | ||
Former [2003/45] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
ES | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
DK | 17.06.1999 | ||
MC | 30.11.1999 | ||
Former [2003/18] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
ES | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2003/17] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
ES | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
MC | 31.05.1999 | ||
Former [2002/25] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
ES | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2002/23] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
SE | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2001/23] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
GR | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2000/52] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
CH | 17.03.1999 | ||
LI | 17.03.1999 | ||
NL | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2000/50] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
NL | 17.03.1999 | ||
CH | 22.06.1999 | ||
LI | 22.06.1999 | ||
MC | 30.11.1999 | ||
Former [2000/25] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
NL | 17.03.1999 | ||
MC | 30.11.1999 | ||
Former [2000/23] | AT | 17.03.1999 | |
BE | 17.03.1999 | ||
NL | 17.03.1999 | ||
Former [2000/21] | AT | 17.03.1999 | |
NL | 17.03.1999 | ||
Former [1999/36] | NL | 17.03.1999 | Documents cited: | Search | [YA]EP0262253 (IBM [US]) [Y] 1-13,32-40,49,50,53-65,67 * the whole document * [A] 43; | [A]EP0397416 (AMERSHAM INT PLC [GB]) [A] 41,42 * column 7, line 38 - column 11, line 32; figures 1-10 *; | [DY] - ARNEY S C ET AL, "Formation of submicron silicon-on-insulator structures by lateral oxidation of substrate-silicon islands", 31ST INTERNATIONAL SYMPOSIUM ON ELECTRON, ION, AND PHOTON BEAMS, WOODLAND HILLS, CA, USA, 26-29 MAY 1987, ISSN 0734-211X, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (MICROELECTRONICS PROCESSING AND PHENOMENA), JAN.-FEB. 1988, USA, vol. 6, no. 1, pages 341 - 345, XP002010230 [DY] 1-13,32-40,49,50,53-65,67 * the whole document * DOI: http://dx.doi.org/10.1116/1.583993 | [PX] - YAO J J ET AL, "FABRICATION OF HIGH FREQUENCY TWO-DIMENSIONAL NANOACTUATORS FOR SCANNED PROBE DEVICES", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, (19920301), vol. 1, no. 1, pages 14 - 22, XP000304097 [PX] 1-32,49-60,64-66 * the whole document * DOI: http://dx.doi.org/10.1109/84.128051 | [A] - SPALLAS J P ET AL, "Self-aligned silicon-strip field emitter array", VACUUM MICROELECTRONICS 1989. PROCEEDINGS OF THE SECOND INTERNATIONAL CONFERENCE, BATH, UK, 24-26 JULY 1989, ISBN 0-85498-055-5, 1989, BRISTOL, UK, IOP, UK, pages 1 - 4, XP000577974 [A] 1,43,44,46 * the whole document * | [A] - KENNY T W ET AL, "MICROMACHINED SILICON TUNNEL SENSOR FOR MOTION DETECTION", APPLIED PHYSICS LETTERS, (19910107), vol. 58, no. 1, pages 100 - 102, XP000201735 [A] 1 * the whole document * DOI: http://dx.doi.org/10.1063/1.104432 | International search | [Y]US4668865 (GIMZEWSKI JAMES K [CH], et al); | [A]US4831614 (DUERIG URS T [CH], et al); | [XP]US5103095 (ELINGS VIRGIL B [US], et al) |