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EP0588080
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EP About this file: EP0588080
| EP0588080 - Selective, low-temperature chemical vapor deposition of gold [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 21.02.1997 Database last updated on 12.11.2024 | Most recent event Tooltip | 21.02.1997 | Application deemed to be withdrawn | published on 09.04.1997 [1997/15] | Applicant(s) | For all designated states International Business Machines Corporation New Orchard Road Armonk, NY 10504 / US | [N/P] |
| Former [1994/12] | For all designated states International Business Machines Corporation Old Orchard Road Armonk, N.Y. 10504 / US | Inventor(s) | 01 /
Holl, Mark Monroe Banaszak 231 Gano Street Providence, Rhode Island 02906 / US | 02 /
Kowalczyk, Steven Paul 63 Snowden Avenue Ossining, New York 10562 / US | 03 /
McFeely, Fenton Read 25 Donald Lane Ossining, New York 10562 / US | 04 /
Seidler, Paul Fredrich 42 Shields Lane Ridgefield, Connecticut 06877 / US | [1994/12] | Representative(s) | Rach, Werner, et al IBM Deutschland Management & Business Support GmbH Patentwesen u. Urheberrecht 71137 Ehningen / DE | [N/P] |
| Former [1996/33] | Rach, Werner, Dr., et al IBM Deutschland Informationssysteme GmbH, Patentwesen und Urheberrecht 70548 Stuttgart / DE | ||
| Former [1994/38] | Schäfer, Wolfgang, Dipl.-Ing. IBM Deutschland Informationssysteme GmbH Patentwesen und Urheberrecht D-70548 Stuttgart / DE | ||
| Former [1994/12] | Mönig, Anton, Dipl.-Ing. IBM Deutschland Informationssysteme GmbH, Patentwesen und Urheberrecht D-70548 Stuttgart / DE | Application number, filing date | 93113141.1 | 17.08.1993 | [1994/12] | Priority number, date | US19920946275 | 16.09.1992 Original published format: US 946275 | [1994/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0588080 | Date: | 23.03.1994 | Language: | EN | [1994/12] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 11.11.1993 | Classification | IPC: | C23C16/18, C23C16/02, C23C16/04, H01L21/3205 | [1994/12] | CPC: |
C23C16/0236 (EP,US);
C23C16/0245 (EP,US);
C23C16/0281 (EP,US);
C23C16/04 (EP,US);
C23C16/18 (EP,US);
H01L21/28562 (EP,US);
H01L21/32051 (EP,US)
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| Designated contracting states | DE, FR, GB [1994/12] | Title | German: | Flächenselektiven chemische Dampfabscheidung von Gold | [1994/12] | English: | Selective, low-temperature chemical vapor deposition of gold | [1994/12] | French: | Dépôt chimique en phase vapeur d'or sur régions sélectionnées | [1994/12] | Examination procedure | 18.07.1994 | Examination requested [1994/37] | 02.01.1995 | Despatch of a communication from the examining division (Time limit: M06) | 04.05.1995 | Reply to a communication from the examining division | 26.02.1996 | Despatch of communication of intention to grant (Approval: Yes) | 28.06.1996 | Communication of intention to grant the patent | 15.10.1996 | Application deemed to be withdrawn, date of legal effect [1997/15] | 08.11.1996 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [1997/15] | Fees paid | Renewal fee | 10.08.1995 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.08.1996 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [AD]US4714627 (PUDDEPHATT RICHARD J [CA], et al) [AD] 1-15 * examples 5-7 *; | [AD]DE3916622 (NIPPON TELEGRAPH & TELEPHONE [JP]) [AD] 1-15 * example 1 *; | [A]JPH0360111 | [A] - S.J.KIRCH ET AL, "SPONTANEOUS DECOMPOSITION OF DIMETHYL GOLD HEXAFLUOROACETYLACETONATE ON ION BOMBARDED SURFACES", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY,A, N.Y,U.S, (199009), vol. 8, no. 5, pages 3701 - 3706, XP000217252 [A] 1-15 * page 3704, column R, line 4 - page 3705, column L, line 6 * DOI: http://dx.doi.org/10.1116/1.576482 | [A] - PATENT ABSTRACTS OF JAPAN, (19910530), vol. 15, no. 213, Database accession no. (E - 1073), & JP03060111 A 19910315 (NIPPON TELEGRAPH AND TELEPHONE CORP) [A] 1-15 * abstract * |