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Extract from the Register of European Patents

EP About this file: EP0584778

EP0584778 - Method of preparing a semiconductor substrate [Right-click to bookmark this link]
Former [1994/09]Semiconductor substrate and method for preparing it
[2003/13]
StatusNo opposition filed within time limit
Status updated on  10.09.2004
Database last updated on 20.09.2024
Most recent event   Tooltip28.12.2007Lapse of the patent in a contracting state
New state(s): IT
published on 30.01.2008  [2008/05]
Applicant(s)For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
[N/P]
Former [1994/09]For all designated states
CANON KABUSHIKI KAISHA
30-2, 3-chome, Shimomaruko, Ohta-ku
Tokyo / JP
Inventor(s)01 / Yonehara, Takao, c/o Canon Kabushiki Kaisha
3-30-2, Shimomaruko
Ohta-ku, Tokyo 146 / JP
[1994/09]
Representative(s)Leson, Thomas Johannes Alois, et al
TBK
Bavariaring 4-6
80336 München / DE
[N/P]
Former [2002/38]Leson, Thomas Johannes Alois, Dipl.-Ing., et al
c/o TBK-Patent, P.O. Box 20 19 18
80019 München / DE
Former [1994/09]Tiedtke, Harro, Dipl.-Ing.
Patentanwaltsbüro Tiedtke-Bühling-Kinne & Partner Bavariaring 4
D-80336 München / DE
Application number, filing date93113473.824.08.1993
[1994/09]
Priority number, dateJP1992024717325.08.1992         Original published format: JP 24717392
[1994/09]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0584778
Date:02.03.1994
Language:EN
[1994/09]
Type: A3 Search report 
No.:EP0584778
Date:08.10.1997
[1997/41]
Type: B1 Patent specification 
No.:EP0584778
Date:05.11.2003
Language:EN
[2003/45]
Search report(s)(Supplementary) European search report - dispatched on:EP21.08.1997
ClassificationIPC:H01L21/20, H01L21/76
[1994/09]
CPC:
H01L21/2007 (EP,US); H01L2224/83894 (EP,US); Y10S148/012 (EP);
Y10S148/135 (EP)
Designated contracting statesDE,   FR,   GB,   IT,   NL [1994/09]
TitleGerman:Verfahren zur Herstellung eines Halbleitersubstrats[2003/13]
English:Method of preparing a semiconductor substrate[2003/13]
French:Procédé de fabrication d'un substrat semiconducteur[2003/13]
Former [1994/09]Halbleitersubstrat und Verfahren zu seiner Herstellung
Former [1994/09]Semiconductor substrate and method for preparing it
Former [1994/09]Substrat semi-conducteur et procédé de sa fabrication
Examination procedure23.02.1998Examination requested  [1998/17]
17.02.1999Despatch of a communication from the examining division (Time limit: M06)
12.08.1999Reply to a communication from the examining division
17.02.2000Despatch of a communication from the examining division (Time limit: M04)
14.06.2000Reply to a communication from the examining division
01.02.2001Despatch of a communication from the examining division (Time limit: M06)
09.08.2001Reply to a communication from the examining division
19.03.2003Communication of intention to grant the patent
21.07.2003Fee for grant paid
21.07.2003Fee for publishing/printing paid
Opposition(s)06.08.2004No opposition filed within time limit [2004/44]
Fees paidRenewal fee
29.08.1995Renewal fee patent year 03
27.08.1996Renewal fee patent year 04
27.08.1997Renewal fee patent year 05
28.08.1998Renewal fee patent year 06
31.08.1999Renewal fee patent year 07
30.08.2000Renewal fee patent year 08
29.08.2001Renewal fee patent year 09
29.08.2002Renewal fee patent year 10
28.08.2003Renewal fee patent year 11
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Lapses during opposition  TooltipIT05.11.2003
NL05.11.2003
[2008/05]
Former [2004/33]NL05.11.2003
Documents cited:Search[A]US4774196  (BLANCHARD RICHARD A [US]) [A] 1,2 * claims 1,3,15 *;
 [A]DE3829906  (SIEMENS AG [DE]) [A] 1,2 * claims 1,2 *;
 [A]  - GOETZ G G ET AL, Generalized bonding, 1989, NEW YORK, NY, USA, IEEE, USA, PAGE(S) 125 - 126, 1989 IEEE SOS/SOI TECHNOLOGY CONFERENCE (CAT. NO.89CH2796-1), STATELINE, NV, USA, 3-5 OCT. 1989, XP000167660 [A] 1,2,6 * the whole document *
 [A]  - Y. SUGAWARA ET AL., "NEW DIELECTRIC ISOLATION FOR HIGH VOLTAGE POWER ICS BY SINGLE SILICON POLY SILICON DIRECT BONDING (SPDB) TECHNIQUE", PROCEEDINGS OF TGHE 1992 INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES&IC'S., TOKYO, pages 316 - 321, XP000340051 [A] 1,2,6 * the whole document *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.