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EP0599276
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Extract from the Register of European Patents
EP Citations: EP0599276
| Cited in | Search | Type: | Patent literature | Publication No.: | EP0574859
[E] (APPLIED MATERIALS INC [US]) [E] 1-3,5-7 * the whole document *; | Type: | Patent literature | Publication No.: | EP0291786
[A] (IBM [US]) [A] 1-3,5-7 * page 8, line 16 - page 9, line 34 *; | Type: | Patent literature | Publication No.: | JPS60154621
[A] ; | Type: | Patent literature | Publication No.: | JPH04228573
[A] | Type: | Non-patent literature | Publication information: | [A] - PATENT ABSTRACTS OF JAPAN, (19851217), vol. 9, no. 321, Database accession no. (E - 367), & JP60154621 A 19850814 (HITACHI SEISAKUSHO) [A] 1-7 * abstract * | Type: | Non-patent literature | Publication information: | [A] - ANONYMOUS, "Pump/purge procedure using neon feedstock", IBM TECHNICAL DISCLOSURE BULLETIN., NEW YORK US, (199204), vol. 34, no. 11, pages 237 - 238 [A] 4 * the whole document * | Type: | Non-patent literature | Publication information: | [A] - PATENT ABSTRACTS OF JAPAN, (19921221), vol. 16, no. 581, Database accession no. (C - 1012), & JP04228573 A 19920818 (MATSUSHITA ELECTRIC) [A] 1-7 * abstract * |