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EP0599276
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EP About this file: EP0599276
| EP0599276 - Method of removing particles from the surface of a substrate [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 17.10.1997 Database last updated on 18.11.2024 | Most recent event Tooltip | 17.10.1997 | Application deemed to be withdrawn | published on 03.12.1997 [1997/49] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue M/S 2061 Santa Clara, California 95054-3299 / US | [N/P] |
| Former [1994/22] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara California 95054-3299 / US | Inventor(s) | 01 /
Gupta, Anand 1270 Briarcreek Ct. San Jose, CA 95131 / US | [1994/22] | Representative(s) | Diehl, Hermann O. Th., et al Diehl & Partner GbR Augustenstrasse 46 80333 München / DE | [N/P] |
| Former [1994/22] | Diehl, Hermann, Dr. Dipl.-Phys., et al DIEHL, GLÄSER, HILTL & PARTNER Patentanwälte Flüggenstrasse 13 D-80639 München / DE | Application number, filing date | 93118840.3 | 23.11.1993 | [1994/22] | Priority number, date | US19920980828 | 24.11.1992 Original published format: US 980828 | [1994/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0599276 | Date: | 01.06.1994 | Language: | EN | [1994/22] | Type: | A3 Search report | No.: | EP0599276 | Date: | 22.06.1994 | Language: | EN | [1994/25] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.05.1994 | Classification | IPC: | H01L21/306, H01L21/00 | [1994/22] | CPC: |
H01L21/02046 (EP,US);
H01L21/304 (KR);
Y10S438/906 (EP,US)
| Designated contracting states | BE, DE, ES, FR, GB, NL [1994/22] | Title | German: | Verfahren zum Enfernen von Teilchen von einer Substratoberfläche | [1994/22] | English: | Method of removing particles from the surface of a substrate | [1994/22] | French: | Procédé pour enlever les particules de la surface d'un substrat | [1994/22] | Examination procedure | 19.09.1994 | Examination requested [1994/46] | 24.10.1994 | Despatch of a communication from the examining division (Time limit: M06) | 11.04.1995 | Reply to a communication from the examining division | 10.10.1995 | Despatch of a communication from the examining division (Time limit: M04) | 14.02.1996 | Reply to a communication from the examining division | 01.03.1996 | Despatch of a communication from the examining division (Time limit: M04) | 05.07.1996 | Reply to a communication from the examining division | 03.06.1997 | Application deemed to be withdrawn, date of legal effect [1997/49] | 07.07.1997 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [1997/49] | Fees paid | Renewal fee | 29.11.1995 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 30.11.1996 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [E]EP0574859 (APPLIED MATERIALS INC [US]) [E] 1-3,5-7 * the whole document *; | [A]EP0291786 (IBM [US]) [A] 1-3,5-7 * page 8, line 16 - page 9, line 34 *; | [A]JPS60154621 ; | [A]JPH04228573 | [A] - PATENT ABSTRACTS OF JAPAN, (19851217), vol. 9, no. 321, Database accession no. (E - 367), & JP60154621 A 19850814 (HITACHI SEISAKUSHO) [A] 1-7 * abstract * | [A] - ANONYMOUS, "Pump/purge procedure using neon feedstock", IBM TECHNICAL DISCLOSURE BULLETIN., NEW YORK US, (199204), vol. 34, no. 11, pages 237 - 238 [A] 4 * the whole document * | [A] - PATENT ABSTRACTS OF JAPAN, (19921221), vol. 16, no. 581, Database accession no. (C - 1012), & JP04228573 A 19920818 (MATSUSHITA ELECTRIC) [A] 1-7 * abstract * |