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Extract from the Register of European Patents

EP About this file: EP0558260

EP0558260 - Method for formation of contact vias in integrated circuits [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  07.07.2000
Database last updated on 05.10.2024
Most recent event   Tooltip07.07.2000No opposition filed within time limitpublished on 23.08.2000 [2000/34]
Applicant(s)For all designated states
STMicroelectronics, Inc.
1310 Electronics Drive
Carrollton, TX 75006-5039 / US
[1999/08]
Former [1993/35]For all designated states
SGS-THOMSON MICROELECTRONICS, INC.
1310 Electronics Drive
Carrollton Texas 75006 / US
Inventor(s)01 / Huang, Kuei-Wu
9825 w. Valley Ranch Parkway No.1220
Irving, Dallas County, Texas 75063 / US
[1993/35]
Representative(s)Palmer, Roger, et al
PAGE, WHITE & FARRER 54 Doughty Street
London WC1N 2LS / GB
[1993/35]
Application number, filing date93301304.723.02.1993
[1993/35]
Priority number, dateUS1992084350728.02.1992         Original published format: US 843507
[1993/35]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0558260
Date:01.09.1993
Language:EN
[1993/35]
Type: B1 Patent specification 
No.:EP0558260
Date:08.09.1999
Language:EN
[1999/36]
Search report(s)(Supplementary) European search report - dispatched on:EP04.06.1993
ClassificationIPC:H01L21/768, H01L21/311
[1998/45]
CPC:
H01L21/76802 (EP,US)
Former IPC [1993/35]H01L21/90, H01L21/311
Designated contracting statesDE,   FR,   GB,   IT [1993/35]
TitleGerman:Herstellungsverfahren von Kontaktöffnungen in integrierten Schaltungen[1993/35]
English:Method for formation of contact vias in integrated circuits[1993/35]
French:Méthode de formation de vias de contact dans des circuits intégrés[1993/35]
Examination procedure24.02.1994Examination requested  [1994/17]
06.09.1995Despatch of a communication from the examining division (Time limit: M06)
15.03.1996Reply to a communication from the examining division
16.10.1996Despatch of a communication from the examining division (Time limit: M06)
11.04.1997Reply to a communication from the examining division
13.11.1998Despatch of communication of intention to grant (Approval: Yes)
15.03.1999Communication of intention to grant the patent
27.05.1999Fee for grant paid
27.05.1999Fee for publishing/printing paid
Opposition(s)09.06.2000No opposition filed within time limit [2000/34]
Fees paidRenewal fee
17.02.1995Renewal fee patent year 03
26.02.1996Renewal fee patent year 04
11.02.1997Renewal fee patent year 05
23.02.1998Renewal fee patent year 06
16.02.1999Renewal fee patent year 07
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Documents cited:Search[X]US4489481  (JONES GARY W [US]);
 [X]BE901350  (ITT IND BELGIUM);
 [X]EP0388862  (FUJITSU LTD [JP]);
 [XP]EP0488546  (SGS THOMSON MICROELECTRONICS [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.