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Extract from the Register of European Patents

EP About this file: EP0608603

EP0608603 - Copper-based metallization for hybrid integrated circuits [Right-click to bookmark this link]
Former [1994/31]Improved copper-based metallizations for hybrid integrated circuits
[1998/19]
StatusNo opposition filed within time limit
Status updated on  05.11.1999
Database last updated on 04.11.2024
Most recent event   Tooltip05.11.1999No opposition filed within time limitpublished on 22.12.1999 [1999/51]
Applicant(s)For all designated states
AT&T Corp.
32 Avenue of the Americas
New York, NY 10013-2412 / US
[1994/40]
Former [1994/31]For all designated states
AT&T Corp.
32 Avenue of the Americas
New York, NY 10013-2412 / US
Inventor(s)01 / Frankenthal, Robert Peter
18 Dunnder Drive
Summit, New Jersey 07901 / US
02 / Ibidunni, Ajibola O.
30 Riverview Circle
Litchfield, New Hampshire 03051 / US
03 / Krause, Dennis Lyle
16 Maple Avenue
Atkinson, New Hampshire 03811 / US
[1994/31]
Representative(s)Johnston, Kenneth Graham, et al
Lucent Technologies EUR-IP UK Ltd Unit 18, Core 3 Workzone Innova Business Park Electric Avenue
Enfield, EN3 7XB / GB
[N/P]
Former [1994/31]Johnston, Kenneth Graham, et al
AT&T (UK) Ltd. 5 Mornington Road
Woodford Green Essex, IG8 OTU / GB
Application number, filing date93308338.820.10.1993
[1994/31]
Priority number, dateUS1992096881030.10.1992         Original published format: US 968810
[1994/31]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0608603
Date:03.08.1994
Language:EN
[1994/31]
Type: B1 Patent specification 
No.:EP0608603
Date:30.12.1998
Language:EN
[1998/53]
Search report(s)(Supplementary) European search report - dispatched on:EP14.06.1994
ClassificationIPC:H01L23/498
[1994/31]
CPC:
H05K3/244 (EP,US); H01L21/302 (KR); C23C28/021 (EP,US);
C25D5/022 (EP,US); C25D5/12 (EP,KR,US); H01L23/49866 (EP,US);
H05K3/108 (EP,US); H05K3/388 (EP,US); H01L2924/0002 (EP,US);
H05K2203/0723 (EP,US); H05K3/062 (EP,US); H05K3/243 (EP,US) (-)
C-Set:
H01L2924/0002, H01L2924/00 (EP,US)
Designated contracting statesDE,   ES,   FR,   GB,   NL [1994/31]
TitleGerman:Kupferbasierte Metallisierung für hybride integrierte Schaltungen[1998/19]
English:Copper-based metallization for hybrid integrated circuits[1998/19]
French:Métallisation à base de cuivre pour circuits intégrés hybrides[1998/19]
Former [1994/31]Verbesserte kupferbasierte Metallisierung für hybride integrierte Schaltungen
Former [1994/31]Improved copper-based metallizations for hybrid integrated circuits
Former [1994/31]Métallisations améliorées à base de cuivre pour circuits intégrés hybrides.
Examination procedure19.01.1995Examination requested  [1995/12]
12.05.1997Despatch of a communication from the examining division (Time limit: M06)
12.11.1997Reply to a communication from the examining division
07.05.1998Despatch of communication of intention to grant (Approval: Yes)
03.07.1998Communication of intention to grant the patent
14.09.1998Fee for grant paid
14.09.1998Fee for publishing/printing paid
Opposition(s)01.10.1999No opposition filed within time limit [1999/51]
Fees paidRenewal fee
17.10.1995Renewal fee patent year 03
23.10.1996Renewal fee patent year 04
10.10.1997Renewal fee patent year 05
16.10.1998Renewal fee patent year 06
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Documents cited:Search[DA]US4109297  (LESH NATHAN GEORGE, et al) [DA] 1,5,8,12 * column 2, line 20 - column 4, line 14 *
 [A]  - FEINSTEIN AND SBAR, "Performance of New Copper-Based Metallization Systems in an 85 C, 78% RH, SO2 Contaminated Environment", IEEE TRANSACTIONS ON COMPONENTS, HYBRIDS AND MANUFACTURING TECHNOLOGY, NEW YORK,USA, (197906), vol. CHMT-2, no. 2, pages 159 - 171 [A] 1,8 * page 159, column R, paragraph 3 - paragraph 5 *
 [A]  - KEMMERER AND MILLS, "Adhesion of thin films of evaporated titanium-copper after electroplating", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, NEW YORK US, (197903), vol. 16, no. 2, pages 352 - 355 [A] 1,8 * page 355, column R, paragraph 3 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.