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EP0628988
European procedure
Extract from the Register of European Patents
EP About this file: EP0628988
| EP0628988 - Semiconductor manufacturing system with self-diagnosing function and self-diagnosing method thereof [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.12.2002 Database last updated on 02.11.2024 | Most recent event Tooltip | 27.12.2002 | No opposition filed within time limit | published on 05.02.2003 [2003/06] | Applicant(s) | For all designated states TOKYO SEIMITSU CO., LTD. 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | [N/P] |
| Former [1994/50] | For all designated states TOKYO SEIMITSU CO., LTD. 7-1, Shimorenjaku 9-chome Mitaka-shi Tokyo / JP | Inventor(s) | 01 /
Nakamura, Masaharu 7-1, Shimorenjaku 9-chome Mitaka-shi, Tokyo / JP | [1994/50] | Representative(s) | Hering, Hartmut Patentanwälte Berendt, Leyh & Hering Innere Wiener Strasse 20 81667 München / DE | [N/P] |
| Former [1994/50] | Hering, Hartmut, Dipl.-Ing. Patentanwälte Berendt, Leyh & Hering Innere Wiener Strasse 20 D-81667 München / DE | Application number, filing date | 94106691.2 | 28.04.1994 | [1994/50] | Priority number, date | JP19930104233 | 30.04.1993 Original published format: JP 10423393 | [1994/50] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0628988 | Date: | 14.12.1994 | Language: | EN | [1994/50] | Type: | B1 Patent specification | No.: | EP0628988 | Date: | 13.02.2002 | Language: | EN | [2002/07] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 19.09.1994 | Classification | IPC: | H01L21/00, G03F7/20, G05B19/18 | [1994/50] | CPC: |
H01L21/67259 (EP,US);
G03F7/70716 (EP,US);
G05B19/4015 (EP,US);
H01L21/681 (EP,US)
| Designated contracting states | DE, FR, GB, IT [1994/50] | Title | German: | Halbleiterherstellungssystem mit Selbstdiagnosefunktion und Selbstdiagnoseverfahren dazu | [1994/50] | English: | Semiconductor manufacturing system with self-diagnosing function and self-diagnosing method thereof | [1994/50] | French: | Système de fabrication de semi-conducteurs avec une fonction autodiagnostique et procédé autodiagnostique pour celui-ci | [1994/50] | Examination procedure | 20.02.1995 | Examination requested [1995/16] | 08.10.1998 | Despatch of a communication from the examining division (Time limit: M06) | 06.04.1999 | Reply to a communication from the examining division | 10.09.1999 | Despatch of a communication from the examining division (Time limit: M06) | 19.01.2000 | Reply to a communication from the examining division | 18.05.2001 | Despatch of communication of intention to grant (Approval: Yes) | 03.08.2001 | Communication of intention to grant the patent | 28.09.2001 | Fee for grant paid | 28.09.2001 | Fee for publishing/printing paid | Opposition(s) | 14.11.2002 | No opposition filed within time limit [2003/06] | Fees paid | Renewal fee | 29.04.1996 | Renewal fee patent year 03 | 25.04.1997 | Renewal fee patent year 04 | 26.04.1998 | Renewal fee patent year 05 | 30.04.1999 | Renewal fee patent year 06 | 28.04.2000 | Renewal fee patent year 07 | 29.04.2001 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPS6380529 ; | [A]EP0445871 (ASM LITHOGRAPHY BV [NL]) [A] 1-21 * figures 1,2,6; claims 1-4,11 *; | [A]EP0037663 (GEN SIGNAL CORP [US]) [A] 1-21 * figures 1-5; claim 1 *; | [A]JPH0529410 | [X] - PATENT ABSTRACTS OF JAPAN, (19880825), vol. 12, no. 314, Database accession no. (E - 649), & JP63080529 A 19880411 (CANON INC.) [X] 1,12 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19930614), vol. 17, no. 310, Database accession no. (E - 1380), & JP05029410 A 19930205 (KOBAYASHI SHIZUO ET AL) [A] 1-21 * abstract * |