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Extract from the Register of European Patents

EP About this file: EP0611946

EP0611946 - Minute step height measuring method and apparatus therefor [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  11.09.1998
Database last updated on 18.11.2024
Most recent event   Tooltip11.09.1998No opposition filed within time limitpublished on 28.10.1998 [1998/44]
Applicant(s)For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-Ku
Tokyo / JP
[N/P]
Former [1997/45]For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-Ku
Tokyo / JP
Former [1994/34]For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome Chiyoda-ku
Tokyo / JP
Inventor(s)01 / Oki, Hiroshi, Azamino Riiberu B-204
1-4, Susukino 1-chome, Midori-ku
Yokohama-shi, Kanagawa-ken / JP
02 / Iwasaki, Yutaka, Kosumo Yokohama Kozukue
Sekandouingu 404, 61-1, Kozukue-cho, Kohoku-ku
Yokohama-shi, Kanagawa-ken / JP
03 / Iwasaki, Jun, Daisan Ohfuna Pakutaun G-710
1555-1, Kasama-cho, Sakae-ku
Yokohama-shi, Kanagawa-ken / JP
[1994/34]
Representative(s)Burke, Steven David, et al
R.G.C. Jenkins & Co 26 Caxton Street
London SW1H 0RJ / GB
[N/P]
Former [1994/34]Burke, Steven David, et al
R.G.C. Jenkins & Co. 26 Caxton Street
London SW1H 0RJ / GB
Application number, filing date94301190.818.02.1994
[1994/34]
Priority number, dateJP1993003015819.02.1993         Original published format: JP 3015893
[1994/34]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0611946
Date:24.08.1994
Language:EN
[1994/34]
Type: B1 Patent specification 
No.:EP0611946
Date:05.11.1997
Language:EN
[1997/45]
Search report(s)(Supplementary) European search report - dispatched on:EP14.06.1994
ClassificationIPC:G01B11/06, G01B9/02
[1994/34]
CPC:
B82Y15/00 (EP); G01B11/0608 (EP); G01B9/02042 (EP);
G01B9/02083 (EP); G01B9/02097 (EP); G02B21/0056 (EP);
G02B21/008 (EP); G01B2210/56 (EP) (-)
Designated contracting statesDE,   FR,   GB [1994/34]
TitleGerman:Verfahren und Gerät zum Messen einer geringen Schritthöhe[1994/34]
English:Minute step height measuring method and apparatus therefor[1994/34]
French:Méthode et appareil pour mesurer un gradin en hauteur infinie[1994/34]
Examination procedure28.10.1994Examination requested  [1994/52]
11.06.1996Despatch of a communication from the examining division (Time limit: M06)
20.12.1996Reply to a communication from the examining division
26.02.1997Despatch of communication of intention to grant (Approval: No)
28.04.1997Despatch of communication of intention to grant (Approval: later approval)
06.05.1997Communication of intention to grant the patent
11.08.1997Fee for grant paid
11.08.1997Fee for publishing/printing paid
Opposition(s)06.08.1998No opposition filed within time limit [1998/44]
Fees paidRenewal fee
08.02.1996Renewal fee patent year 03
10.02.1997Renewal fee patent year 04
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Documents cited:Search[A]EP0094835  (DOWNS) [A] 1,3,5,7 * page 8, line 35 - page 9, line 24; figure - *;
 [A]JPH03278009
 [DYA]  - HIROSHI OOKI E.A., "A NOVEL TYPE OF LASER SCANNING MICROSCOPE: THEORETICAL CONSIDERATIONS", OPTICS COMMUNICATIONS, NORTH-HOLLAND, (1991), vol. 85, pages 177 - 182, XP000220039 [DY] 1,3,5,7 * the whole document * [A] 2,6

DOI:   http://dx.doi.org/10.1016/0030-4018(91)90390-Y
 [Y]  - R.L. JUNGERMAN E.A., "PHASE SENSITIVE SCANNING OPTICAL MICROSCOPE", APPLIED PHYSICS LETTERS, NEW YORK US, (198410), vol. 45, no. 8, doi:doi:10.1063/1.95422, pages 846 - 848, XP002028937 [Y] 1,3,5,7 * the whole document *

DOI:   http://dx.doi.org/10.1063/1.95422
 [A]  - PATENT ABSTRACTS OF JAPAN, (19920311), vol. 16, no. 100, Database accession no. (P - 1323), & JP03278009 A 19911209 (NIKON CORP.) [A] 1 * abstract *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.