EP0617255 - Apparatus and method for thick wafer measurement [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 21.06.1996 Database last updated on 03.09.2024 | Most recent event Tooltip | 21.06.1996 | Withdrawal of application | published on 07.08.1996 [1996/32] | Applicant(s) | For all designated states Hughes Aircraft Company 7200 Hughes Terrace P.O. Box 45066 Los Angeles, California 90045-0066 / US | [N/P] |
Former [1994/39] | For all designated states Hughes Aircraft Company 7200 Hughes Terrace P.O. Box 45066 Los Angeles, California 90045-0066 / US | Inventor(s) | 01 /
Ledger, Anthony 56 Shortwoods Road New Fairfield, Connecticut 06812 / US | [1994/39] | Representative(s) | Colgan, Stephen James, et al CARPMAELS & RANSFORD 43 Bloomsbury Square London WC1A 2RA / GB | [N/P] |
Former [1994/39] | Colgan, Stephen James, et al CARPMAELS & RANSFORD 43 Bloomsbury Square London WC1A 2RA / GB | Application number, filing date | 94302134.5 | 24.03.1994 | [1994/39] | Priority number, date | US19930037069 | 25.03.1993 Original published format: US 37069 | [1994/39] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0617255 | Date: | 28.09.1994 | Language: | EN | [1994/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 25.07.1994 | Classification | IPC: | G01B11/06 | [1994/39] | CPC: |
G01B11/0675 (EP,US)
| Designated contracting states | CH, DE, FR, GB, LI, NL, SE [1994/39] | Title | German: | Verfahren und Vorrichtung zur Messung einer dicken Mikroplatte | [1994/39] | English: | Apparatus and method for thick wafer measurement | [1994/39] | French: | Appareil et procédé pour la mesure d'une plaquette électronique épaisse | [1994/39] | File destroyed: | 20.04.2002 | Examination procedure | 03.03.1995 | Examination requested [1995/18] | 12.06.1996 | Application withdrawn by applicant [1996/32] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.03.1996 | 03   M06   Not yet paid |
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