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Extract from the Register of European Patents

EP About this file: EP0617255

EP0617255 - Apparatus and method for thick wafer measurement [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  21.06.1996
Database last updated on 03.09.2024
Most recent event   Tooltip21.06.1996Withdrawal of applicationpublished on 07.08.1996 [1996/32]
Applicant(s)For all designated states
Hughes Aircraft Company
7200 Hughes Terrace P.O. Box 45066
Los Angeles, California 90045-0066 / US
[N/P]
Former [1994/39]For all designated states
Hughes Aircraft Company
7200 Hughes Terrace P.O. Box 45066
Los Angeles, California 90045-0066 / US
Inventor(s)01 / Ledger, Anthony
56 Shortwoods Road
New Fairfield, Connecticut 06812 / US
[1994/39]
Representative(s)Colgan, Stephen James, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA / GB
[N/P]
Former [1994/39]Colgan, Stephen James, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London WC1A 2RA / GB
Application number, filing date94302134.524.03.1994
[1994/39]
Priority number, dateUS1993003706925.03.1993         Original published format: US 37069
[1994/39]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0617255
Date:28.09.1994
Language:EN
[1994/39]
Search report(s)(Supplementary) European search report - dispatched on:EP25.07.1994
ClassificationIPC:G01B11/06
[1994/39]
CPC:
G01B11/0675 (EP,US)
Designated contracting statesCH,   DE,   FR,   GB,   LI,   NL,   SE [1994/39]
TitleGerman:Verfahren und Vorrichtung zur Messung einer dicken Mikroplatte[1994/39]
English:Apparatus and method for thick wafer measurement[1994/39]
French:Appareil et procédé pour la mesure d'une plaquette électronique épaisse[1994/39]
File destroyed:20.04.2002
Examination procedure03.03.1995Examination requested  [1995/18]
12.06.1996Application withdrawn by applicant  [1996/32]
Fees paidPenalty fee
Additional fee for renewal fee
31.03.199603   M06   Not yet paid
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Documents cited:Search[A]WO9011487  (VEECO INSTR INC [US])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.