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Extract from the Register of European Patents

EP About this file: EP0631298

EP0631298 - A method for the production of semiconductor epitaxial substrate [Right-click to bookmark this link]
Former [1994/52]Semiconductor epitaxial substrate and process for its production
[1999/42]
StatusNo opposition filed within time limit
Status updated on  29.06.2001
Database last updated on 03.10.2024
Most recent event   Tooltip29.06.2001No opposition filed within time limitpublished on 16.08.2001 [2001/33]
Applicant(s)For all designated states
SUMITOMO CHEMICAL COMPANY LIMITED
5-33, Kitahama 4-chome, Chuo-ku Osaka-shi
Osaka 541-0041 / JP
[N/P]
Former [2000/35]For all designated states
SUMITOMO CHEMICAL COMPANY LIMITED
5-33, Kitahama 4-chome, Chuo-ku
Osaka-shi, Osaka 541-0041 / JP
Former [1994/52]For all designated states
SUMITOMO CHEMICAL COMPANY LIMITED
5-33, Kitahama 4-chome, Chuo-ku
Osaka-shi, Osaka 541 / JP
Inventor(s)01 / Hata, Masahiko
1-12-19-205, Ninomiya
Tsukuba-shi, Ibaraki / JP
02 / Fukuhara, Noboru
3-18-5-104, Matsushiro
Tsukuba-shi, Ibaraki / JP
03 / Takata, Hiroaki
2-13-10-206, Amakubo
Tsukuba-shi, Ibaraki / JP
04 / Inui, Katsumi
2-40-1-216, Kasuga
Tsukuba-shi, Ibaraki / JP
[1994/52]
Representative(s)Dixon, Donald Cossar, et al
Wilson Gunn Gee
Chancery House
Chancery Lane
London WC2A 1QU / GB
[N/P]
Former [1996/13]Dixon, Donald Cossar, et al
Gee & Co. Chancery House Chancery Lane
London WC2A 1QU / GB
Former [1994/52]Moore, Anthony John, et al
Gee & Co. Chancery House Chancery Lane
London WC2A 1QU / GB
Application number, filing date94304696.128.06.1994
[1994/52]
Priority number, dateJP1993015685028.06.1993         Original published format: JP 15685093
[1994/52]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0631298
Date:28.12.1994
Language:EN
[1994/52]
Type: A3 Search report 
No.:EP0631298
Date:01.03.1995
Language:EN
[1995/09]
Type: B1 Patent specification 
No.:EP0631298
Date:30.08.2000
Language:EN
[2000/35]
Search report(s)(Supplementary) European search report - dispatched on:EP12.01.1995
ClassificationIPC:H01L21/203, H01L29/80
[1995/07]
CPC:
H01L21/02395 (EP,US); H01L21/20 (KR); H01L21/02433 (EP,US);
H01L21/02463 (EP,US); H01L21/02546 (EP,US); H01L21/02576 (EP,US);
H01L21/0262 (EP,US); H01L21/02631 (EP,US) (-)
Former IPC [1994/52]H01L21/203
Designated contracting statesDE,   FR,   GB [1994/52]
TitleGerman:Ein Verfahren zur Herstellung eines epitaktischen Halbleitersubstrats[1999/42]
English:A method for the production of semiconductor epitaxial substrate[1999/42]
French:Procédé de fabrication d'un substrat semi-conducteur épitaxial[1999/42]
Former [1994/52]Epitaktisches Halbleitersubstrat und Verfahren zu seiner Herstellung
Former [1994/52]Semiconductor epitaxial substrate and process for its production
Former [1994/52]Substrat semi-conducteur épitaxial et procédé pour sa fabrication
Examination procedure02.05.1995Examination requested  [1995/26]
09.09.1997Despatch of a communication from the examining division (Time limit: M06)
14.03.1998Reply to a communication from the examining division
24.11.1998Despatch of a communication from the examining division (Time limit: M04)
20.03.1999Reply to a communication from the examining division
28.10.1999Despatch of communication of intention to grant (Approval: Yes)
02.03.2000Communication of intention to grant the patent
29.05.2000Fee for grant paid
29.05.2000Fee for publishing/printing paid
Opposition(s)31.05.2001No opposition filed within time limit [2001/33]
Fees paidRenewal fee
26.06.1996Renewal fee patent year 03
25.06.1997Renewal fee patent year 04
26.06.1998Renewal fee patent year 05
28.06.1999Renewal fee patent year 06
26.06.2000Renewal fee patent year 07
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Documents cited:Search[Y]US4827320  (MORKOC HADIS [US], et al) [Y] 1-4;
 [A]WO9113466  (VARIAN ASSOCIATES [US]) [A] 1,5;
 [A]EP0539693  (ROHM CO LTD [JP])[A] 1,5
 [Y]  - PATENT ABSTRACTS OF JAPAN [Y] 1-4
 [A]  - PATENT ABSTRACTS OF JAPAN [A] 5-8
 [A]  - PATENT ABSTRACTS OF JAPAN [A] 1-4
ExaminationUS5162243
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.