EP0740794 - PROCESS FOR PRODUCING AN ACCELERATION SENSOR [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 28.01.2000 Database last updated on 24.08.2024 | Most recent event Tooltip | 28.01.2000 | No opposition filed within time limit | published on 15.03.2000 [2000/11] | Applicant(s) | For all designated states SIEMENS AKTIENGESELLSCHAFT Werner-von-Siemens-Str. 1 DE-80333 München / DE | [N/P] |
Former [1996/45] | For all designated states SIEMENS AKTIENGESELLSCHAFT Wittelsbacherplatz 2 80333 München / DE | Inventor(s) | 01 /
KLOSE, Helmut Stefan-George-Ring 9 D-81929 München / DE | 02 /
BIEBL, Markus Oberländerstrasse 24c D-86163 Augsburg / DE | 03 /
SCHEITER, Thomas Ehrengutstrasse 15 D-80469 München / DE | 04 /
HIEROLD, Christopher Dornröschenstrasse 48 D-81739 München / DE | [1996/45] | Application number, filing date | 95905530.2 | 10.01.1995 | [1996/45] | WO1995DE00022 | Priority number, date | DE19944401304 | 18.01.1994 Original published format: DE 4401304 | [1996/45] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO9519572 | Date: | 20.07.1995 | Language: | DE | [1995/31] | Type: | A1 Application with search report | No.: | EP0740794 | Date: | 06.11.1996 | Language: | DE | The application published by WIPO in one of the EPO official languages on 20.07.1995 takes the place of the publication of the European patent application. | [1996/45] | Type: | B1 Patent specification | No.: | EP0740794 | Date: | 24.03.1999 | Language: | DE | [1999/12] | Search report(s) | International search report - published on: | EP | 20.07.1995 | Classification | IPC: | G01P15/08 | [1996/45] | CPC: |
G01P15/0802 (EP,US);
H01L21/265 (US);
G01P15/125 (EP,US);
G01P2015/0828 (EP,US);
Y10S148/159 (EP,US)
| Designated contracting states | AT, DE, FR, GB, IT, NL [1996/45] | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES BESCHLEUNIGUNGSSENSORS | [1996/45] | English: | PROCESS FOR PRODUCING AN ACCELERATION SENSOR | [1996/45] | French: | PROCEDE POUR LA FABRICATION D'UN DETECTEUR D'ACCELERATION | [1996/45] | Entry into regional phase | 06.07.1996 | National basic fee paid | 06.07.1996 | Designation fee(s) paid | 06.07.1996 | Examination fee paid | Examination procedure | 22.05.1995 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 06.07.1996 | Examination requested [1996/45] | 11.09.1998 | Despatch of communication of intention to grant (Approval: Yes) | 25.09.1998 | Communication of intention to grant the patent | 17.12.1998 | Fee for grant paid | 17.12.1998 | Fee for publishing/printing paid | Opposition(s) | 28.12.1999 | No opposition filed within time limit [2000/11] | Fees paid | Renewal fee | 21.01.1997 | Renewal fee patent year 03 | 21.01.1998 | Renewal fee patent year 04 | 20.01.1999 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]US4918032 (JAIN KAILASH C [US], et al) [A] 1,2,4,7 * column 4, line 29 - line 36 * * column 5, line 7 - line 20 * * column 5, line 33 - line 37; figures 1-7 *; | [A]US5241864 (ADDIE DAVID L [US], et al) [A] 7* column 3, line 40 - line 47; figure 7 *; | [A] - RISTIC ET AL, "PROPERTIES OF POLYSILICON FILMS ANNEALED BY A RAPID THERMAL ANNEALING PROCESS.", THIN SOLID FILMS, LAUSANNE, vol. 220, no. 1/2, pages 106 - 110, XP000354480 [A] 1,3,4,6 * page 106, column 2, line 8 - line 31; figure 1 * DOI: http://dx.doi.org/10.1016/0040-6090(92)90556-Q | [A] - PETERSEN ET AL, "MICROMECHANICAL ACCELEROMETER INTEGRATED WITH MOS DETECTION CIRCUITRY.", IEEE TRANSACTIONS ON ELECTRON DEVICES, NEW YORK, (19920101), vol. ED-29, no. 1, pages 23 - 27 [A] 1,4,6,8 * page 23, column 2, line 24 - line 46; figure 1 * | [A] - POLLA ET AL, "INTEGRATED GAAS MICROSENSORS; 90 CH2868-8", 1990 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, SHERATON HOTEL NEW ORLEANS, (19900501), vol. 4, pages 3085 - 3088, XP000163491 [A] 1,7 * page 3085, column 1, line 20 - line 35; figure 1 * |