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EP0799330

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EP About this file: EP0799330

EP0799330 - A METHOD AND APPARATUS FOR VARYING THE FLUX OF A MOLECULAR BEAM PRODUCED BY A MOLECULAR BEAM EPITAXY CELL [Right-click to bookmark this link]
Status	The application has been refused Status updated on 01.11.2002 Database last updated on 11.09.2024
Most recent event Tooltip	01.11.2002	Refusal of application	published on 18.12.2002 [2002/51]
Applicant(s)	For all designated states NORTHROP GRUMMAN CORPORATION 1840 Century Park East Century City Los Angeles, California 90067-2199 / US
	[N/P]
Former [1997/41]	For all designated states NORTHROP GRUMMAN CORPORATION 1840 Century Park East Century City Los Angeles California 90067-2199 / US
Inventor(s)	01 / LEE, Myung, B. 101 River Heights Drive Smithtown, NY 11787 / US
	02 / VANHATALO, Jari 1001 Broughton Drive Beverly, MA 01915 / US
	[1997/41]
Representative(s)	Körber, Wolfhart Mitscherlich & Partner Patentanwälte Sonnenstrasse 33 80331 München / DE
	[N/P]
Former [1997/41]	Körber, Wolfhart, Dr. rer.nat. Patentanwälte Mitscherlich & Partner, Sonnenstrasse 33 80331 München / DE
Application number, filing date	95942600.8	11.12.1995
	[1997/41]
	WO1995US15971
Priority number, date	US19940361961	22.12.1994 Original published format: US 361961
	[1997/41]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO9619597
	Date:	27.06.1996
	Language:	EN
	[1996/29]
	Type:	A1 Application with search report
	No.:	EP0799330
	Date:	08.10.1997
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 27.06.1996 takes the place of the publication of the European patent application.
	[1997/41]
Search report(s)	International search report - published on:	US	27.06.1996
	(Supplementary) European search report - dispatched on:	EP	27.02.1998
Classification	IPC:	C30B25/00, C30B23/06	[1998/12]
	CPC:	C30B23/066 (EP,US); Y10S117/90 (EP,US); Y10T117/10 (EP,US); Y10T117/1016 (EP,US)
	Former IPC [1997/41]	C30B25/00
Designated contracting states	DE, FR, GB, SE [1997/41]
Title	German:	EIN VERFAHREN UND VORRICHTUNG ZUM VERSTELLEN DES MOLEKULARSTRAHLS, DER DURCH EINE MOLEKULARSTRAHL-EPITAXIEZELLE ERZEUGT WIRD	[1997/41]
	English:	A METHOD AND APPARATUS FOR VARYING THE FLUX OF A MOLECULAR BEAM PRODUCED BY A MOLECULAR BEAM EPITAXY CELL	[1997/41]
	French:	PROCEDE ET DISPOSITIF DE MODIFICATION DU FLUX D'UN FAISCEAU MOLECULAIRE PRODUIT PAR UNE CELLULE D'EPITAXIE DE FAISCEAU MOLECULAIRE	[1997/41]
Entry into regional phase	01.07.1997	National basic fee paid
	01.07.1997	Search fee paid
	01.07.1997	Designation fee(s) paid
	01.07.1997	Examination fee paid
Examination procedure	18.07.1996	Request for preliminary examination filed International Preliminary Examining Authority: US
	01.07.1997	Examination requested [1997/41]
	20.08.1999	Despatch of a communication from the examining division (Time limit: M06)
	08.02.2000	Reply to a communication from the examining division
	04.08.2000	Despatch of a communication from the examining division (Time limit: M06)
	16.01.2001	Reply to a communication from the examining division
	25.04.2001	Despatch of a communication from the examining division (Time limit: M02)
	25.06.2001	Reply to a communication from the examining division
	31.01.2002	Despatch of communication of intention to grant (Approval: )
	15.07.2002	Despatch of communication that the application is refused, reason: formalities examination [2002/51]
	25.07.2002	Application refused, date of legal effect [2002/51]
Fees paid	Renewal fee
	24.11.1997	Renewal fee patent year 03
	20.11.1998	Renewal fee patent year 04
	19.11.1999	Renewal fee patent year 05
	20.11.2000	Renewal fee patent year 06
	Penalty fee
	Additional fee for renewal fee
	31.12.2001	07 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[X]JPS62132314 ;
		[A]FR2703077 (HARMAND JEAN CHRISTOPHE [FR]);
		[A]JPS60204694 ;
		[A]JPH04356915 ;
		[X] - PATENT ABSTRACTS OF JAPAN, (19871119), vol. 11, no. 355, Database accession no. (E - 558), & JP62132314 A 19870615 (TOSHIBA CORP.) [X] 1 * abstract *
		[A] - PATENT ABSTRACTS OF JAPAN, (19860315), vol. 10, no. 67, Database accession no. (C - 333)<2124>, & JP60204694 A 19851016 (TOSHIBA KK) [A] * abstract *
		[A] - PATENT ABSTRACTS OF JAPAN, (19930507), vol. 17, no. 223, Database accession no. (E - 1359), & JP04356915 A 19921210 (NISSIN ELECTRIC CO LTD) [A] * abstract *
		[A] - THORPE ET AL., "improved thickness uniformity in molecular beam epitaxial growth...", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A., NEW YORK US, (199112), vol. 9, no. 6, pages 3175 - 3177, XP000335273 DOI: http://dx.doi.org/10.1116/1.577141
	International search	[Y]US4181544 (CHO ALFRED Y [US]);
		[YP]US5415128 (KAO YUNG-CHUNG [US], et al);
		[A]US4622083 (SHIH HUNG-DAH [US]);
		[A]US3839084 (CHO A, et al)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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