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EP0797830

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EP About this file: EP0797830

EP0797830 - EXIT WINDOW FOR X-RAY LITHOGRAPHY BEAMLINE [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 17.12.1999 Database last updated on 12.11.2024
Most recent event Tooltip	17.12.1999	Application deemed to be withdrawn	published on 02.02.2000 [2000/05]
Applicant(s)	For all designated states GRUMMAN AEROSPACE CORPORATION 1111 Stewart Avenue Bethpage, NY 11714-3580 / US
	[1997/40]
Inventor(s)	01 / KOVACS, Stephen 74 Manchester Lane Stony Brook, NY 11790 / US
	[1997/40]
Representative(s)	Schmidt-Evers, Jürgen Mitscherlich PartmbB Patent- und Rechtsanwälte Sonnenstrasse 33 80331 München / DE
	[N/P]
Former [1997/40]	Schmidt-Evers, Jürgen, Dipl.-Ing. Patentanwälte Mitscherlich & Partner, Sonnenstrasse 33 80331 München / DE
Application number, filing date	95943093.5	08.12.1995
	[1997/40]
	WO1995US16213
Priority number, date	US19940356493	15.12.1994 Original published format: US 356493
	[1997/40]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO9619000
	Date:	20.06.1996
	Language:	EN
	[1996/28]
	Type:	A1 Application with search report
	No.:	EP0797830
	Date:	01.10.1997
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 20.06.1996 takes the place of the publication of the European patent application.
	[1997/40]
Search report(s)	International search report - published on:	US	20.06.1996
	(Supplementary) European search report - dispatched on:	EP	29.09.1997
Classification	IPC:	G21K1/00, G21K5/00	[1997/40]
	CPC:	G03F7/70808 (EP,US); G03F7/70841 (EP,US); H01J5/18 (EP,US); H05H7/00 (EP,US)
Designated contracting states	DE, FR, GB [1997/40]
Title	German:	AUSTRITTSFENSTER FÜR RÖNTGENSTRAHLUNGSLITHOGRAPHIE	[1997/40]
	English:	EXIT WINDOW FOR X-RAY LITHOGRAPHY BEAMLINE	[1997/40]
	French:	FENETRE DE SORTIE POUR FAISCEAU DE RAYONS X LITHOGRAPHIQUES	[1997/40]
Entry into regional phase	02.07.1997	National basic fee paid
	02.07.1997	Search fee paid
	02.07.1997	Designation fee(s) paid
	02.07.1997	Examination fee paid
Examination procedure	15.07.1996	Request for preliminary examination filed International Preliminary Examining Authority: US
	02.07.1997	Examination requested [1997/40]
	18.03.1999	Despatch of a communication from the examining division (Time limit: M04)
	29.07.1999	Application deemed to be withdrawn, date of legal effect [2000/05]
	30.08.1999	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2000/05]
Fees paid	Renewal fee
	24.11.1997	Renewal fee patent year 03
	20.11.1998	Renewal fee patent year 04
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]JPS62285352 ;
		[A]US3348090 (TAYLOR RANDOLPH G) [A] 4,6* column 1, line 28 - line 59 *;
		[A]US3878417 (EBERLEIN DIETER) [A] 1,9,12 * column 1, line 27 - line 63 * * figure 1 *;
		[DA]US5031199 (COLE III RICHARD K [US], et al) [DA] 4,6 * column 4, line 17 - line 30 * * column 9, line 11 - line 21 * * column 10, line 21 - line 23 *;
		[A]GB2255886 (BRITISH AEROSPACE [GB]) [A] 1,9,13,14 * page 1, paragraph L * * page 2, paragraph L - page 3, paragraph 2 * * page 4, paragraph L - page 5, paragraph 1 *;
		[A]US5235239 (JACOB JONAH H [US], et al) [A] 1-3,5,8-12,15-17 * column 2, line 3 - column 3, line 5 * * column 4, line 3 - line 17 * * figures 1,2 *;
		[A] - HIRDES ET AL., "Metal foils as windows of a gas-jet thermalization chamber at a heavy-ion beam", NUCLEAR INSTRUMENTS AND METHODS., AMSTERDAM NL, (1975), vol. 130, pages 15 - 18, XP002041582 [A] 1,9,13 * page 15, column L, paragraph 3 - paragraph 5 * * page 16, column L, paragraph 2 - paragraph 3 * DOI: http://dx.doi.org/10.1016/0029-554X(75)90149-4
		[A] - PATENT ABSTRACTS OF JAPAN, (19880525), vol. 012, no. 177, Database accession no. (E - 613), & JP62285352 A 19871211 (HITACHI LTD) [A] 1,5,17 * abstract *
	International search	[X]US5159621 (WATANABE YUTAKA [JP], et al)

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