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Extract from the Register of European Patents

EP About this file: EP0736789

EP0736789 - Catadioptric optical system and exposure apparatus having the same [Right-click to bookmark this link]
StatusPatent revoked
Status updated on  04.09.2009
Database last updated on 15.07.2024
Most recent event   Tooltip04.09.2009Revocation of patentpublished on 07.10.2009  [2009/41]
Applicant(s)For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100 / JP
[N/P]
Former [1996/41]For all designated states
NIKON CORPORATION
2-3, Marunouchi 3-chome Chiyoda-ku
Tokyo 100 / JP
Inventor(s)01 / Takahashi, Tomowaki, c/o Nikon Corp.
Int. Prop. H.Q., 2-3, Marunouchi 3-chome
Chiyoda-ku, Tokyo / JP
[1996/41]
Representative(s)von Fischern, Bernhard, et al
Hoffmann - Eitle
Patent- und Rechtsanwälte
Arabellastrasse 4
81925 München / DE
[N/P]
Former [1996/41]Ritter und Edler von Fischern, Bernhard, Dipl.-Ing., et al
Hoffmann, Eitle & Partner, Patentanwälte, Arabellastrasse 4
81925 München / DE
Application number, filing date96105452.504.04.1996
[1996/41]
Priority number, dateJP1995008238007.04.1995         Original published format: JP 8238095
JP1996003097819.02.1996         Original published format: JP 3097896
[1996/41]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0736789
Date:09.10.1996
Language:EN
[1996/41]
Type: A3 Search report 
No.:EP0736789
Date:05.02.1997
[1997/06]
Type: B1 Patent specification 
No.:EP0736789
Date:19.03.2003
Language:EN
[2003/12]
Search report(s)(Supplementary) European search report - dispatched on:EP20.12.1996
ClassificationIPC:G02B17/08, G03F7/20, G03B27/32
[1996/41]
CPC:
G02B17/0892 (EP,US); G02B17/0856 (KR); G02B17/08 (EP,US);
G03F7/70225 (EP,US); G03F7/70275 (EP,US); G03F7/70358 (EP,US)
Designated contracting statesDE,   GB,   NL [1996/41]
TitleGerman:Catadioptrisches System und dieses verwendender Belichtungsapparat[1996/41]
English:Catadioptric optical system and exposure apparatus having the same[1996/41]
French:Système catadioptrique et appareil d'exposition lumineuse utilisante ce système[1996/41]
Examination procedure05.05.1997Examination requested  [1997/27]
23.05.2002Despatch of communication of intention to grant (Approval: Yes)
07.10.2002Communication of intention to grant the patent
19.12.2002Fee for grant paid
19.12.2002Fee for publishing/printing paid
Opposition(s)Opponent(s)01  19.12.2003  12.02.2004  ADMISSIBLE
Carl Zeiss
73446 Oberkochen / DE
Opponent's representative
Prins, Adrianus Willem
V.O.
Johan de Wittlaan 7
2517 JR Den Haag / NL
 [N/P]
Former [2004/13]
Opponent(s)01  19.12.2003   
Carl Zeiss
73446 Oberkochen / DE
Opponent's representative
Prins, Adrianus Willem
Vereenigde, Nieuwe Parklaan 97
2587 BN Den Haag / NL
22.12.2003No opposition filed within time limit [2004/11]
19.02.2004Invitation to proprietor to file observations on the notice of opposition
24.03.2004Deletion: No opposition filed within time limit [2004/13]
27.08.2004Reply of patent proprietor to notice(s) of opposition
06.09.2004Communication of observations of patent proprietor (Time limit: M06)
10.04.2008Date of oral proceedings
25.04.2008Despatch of interlocutory decision in opposition
25.04.2008Despatch of minutes of oral proceedings
05.05.2008Legal effect of interlocutory decision in opposition
15.09.2008Despatch of communication that the patent will be maintained as amended
19.05.2009Despatch of communication that the patent will be revoked
29.05.2009Legal effect of revocation of patent [2009/41]
Fees paidRenewal fee
22.04.1998Renewal fee patent year 03
28.04.1999Renewal fee patent year 04
27.04.2000Renewal fee patent year 05
23.04.2001Renewal fee patent year 06
23.04.2002Renewal fee patent year 07
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Documents cited:Search[A]US5323263  (SCHOENMAKERS WIJNAND P [US]) [A] 1-3,5,6,11,18,19,21,22,26;
 [A]EP0604093  (NIPPON KOGAKU KK [JP]) [A] 1-3,6,11,13,18,19,22,26,28;
 [A]US5289312  (HASHIMOTO SUMIO [JP], et al) [A] 1,2,5,9,18,19,21,24;
 [A]US5402267  (FUERTER GERD [DE], et al) [A] 1,3,18
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.