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Extract from the Register of European Patents

EP About this file: EP0834896

EP0834896 - Apparatus for generating an electron beam [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.04.2003
Database last updated on 24.08.2024
Most recent event   Tooltip18.04.2003No opposition filed within time limitpublished on 04.06.2003  [2003/23]
Applicant(s)For all designated states
ADVANTEST CORPORATION
Shinjuku Bldg. 4-1, 2-chome, Shinjuku-ku
Tokyo 163-08 / JP
[N/P]
Former [2002/33]For all designated states
Advantest Corporation
Shinjuku Bldg. 4-1, 2-chome, Shinjuku-ku
Tokyo 163-08 / JP
Former [1998/15]For all designated states
ACT Advanced Circuit Testing Gesellschaft für Testsystementwicklung mbH
Süskindstrasse 4
81929 München / DE
Inventor(s)01 / Spehr, Rainer, Dr.
Erfurter Str. 19
64372 Ober-Ramstadt / DE
02 / Schmitt, Michael, Dipl.-Phys.
Rosenaustr. 6
63069 Offenbach / DE
03 / Frosien, Jürgen, Dr.
Kufsteiner Str. 16A
85521 Riemerling / DE
[1998/15]
Representative(s)Tetzner, Volkmar, et al
Anwaltskanzlei Dr. Tetzner
Van-Gogh-Strasse 3
81479 München / DE
[N/P]
Former [1998/15]Tetzner, Volkmar, Dr.-Ing. Dr. jur., et al
Van-Gogh-Strasse 3
81479 München / DE
Application number, filing date96115830.002.10.1996
[1998/15]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP0834896
Date:08.04.1998
Language:EN
[1998/15]
Type: B1 Patent specification 
No.:EP0834896
Date:12.06.2002
Language:EN
[2002/24]
Search report(s)(Supplementary) European search report - dispatched on:EP07.03.1997
ClassificationIPC:H01J1/34, H01J37/073
[1998/15]
CPC:
H01J37/073 (EP,US); H01J1/34 (EP,US)
Designated contracting statesDE,   FR,   GB,   NL [1998/15]
TitleGerman:Elektronenstrahlerzeugende Vorrichtung[1998/15]
English:Apparatus for generating an electron beam[1998/15]
French:Dispositif générateur de faisceau d'électrons[1998/15]
Examination procedure10.09.1997Examination requested  [1998/15]
20.10.1997Despatch of a communication from the examining division (Time limit: M06)
13.03.1998Reply to a communication from the examining division
15.03.1999Despatch of a communication from the examining division (Time limit: M04)
16.07.1999Reply to a communication from the examining division
02.10.2001Despatch of communication of intention to grant (Approval: Yes)
15.11.2001Communication of intention to grant the patent
11.12.2001Fee for grant paid
11.12.2001Fee for publishing/printing paid
Opposition(s)13.03.2003No opposition filed within time limit [2003/23]
Fees paidRenewal fee
28.10.1998Renewal fee patent year 03
29.10.1999Renewal fee patent year 04
26.10.2000Renewal fee patent year 05
26.10.2001Renewal fee patent year 06
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Documents cited:Search[Y]EP0348611  (IBM [US]) [Y] 1-8,11 * column 5, line 15 - line 38 * * column 5, line 53 - line 58 * * column 6, line 25 - line 27 * * column 6, line 57 - column 7, line 4 * * column 7, line 15 - line 18 * * figure 4 *;
 [DY]EP0445787  (EBARA RES CO LTD [JP]) [DY] 1-8,11 * page 3, line 10 - line 14 * * page 3, line 19 - line 29 * * page 3, line 39 - line 43 * * page 3, line 47 - line 57 * * page 4, line 31 - line 32 *;
 [DA]US4868380  (BOOMAN RICHARD A [US], et al) [DA] 1 * the whole document *;
 [A]  - ANONYMOUS, "Optically Addressed High Resolution Lithography. April 1977.", IBM TECHNICAL DISCLOSURE BULLETIN, NEW YORK, US, (197704), vol. 19, no. 11, page 4385, XP002026208 [A] 1,11 * the whole document *
 [A]  - MERGL E ET AL, "GAASP SPIN-POLARIZED ELECTRON SOURCE FOR A 300 KEV ACCELERATOR", REVIEW OF SCIENTIFIC INSTRUMENTS, (19911001), vol. 62, no. 10, pages 2318 - 2321, XP000264399 [A] 9,10 * page 2318, column R, paragraph 2 *

DOI:   http://dx.doi.org/10.1063/1.1142292
ExaminationDE3200496
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.