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EP0747934
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EP About this file: EP0747934
| EP0747934 - Apparatus for supporting substrates in processing chambers [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 09.01.2004 Database last updated on 19.10.2024 | Most recent event Tooltip | 09.01.2004 | Application deemed to be withdrawn | published on 25.02.2004 [2004/09] | Applicant(s) | For all designated states Applied Materials, Inc. P.O. Box 58039 M/S 0934 3050 Bowers Avenue Santa Clara, California 95052-8039 / US | [N/P] |
| Former [1996/50] | For all designated states APPLIED MATERIALS, INC. P.O. Box 58039, M/S 0934, 3050 Bowers Avenue Santa Clara, California 95052-8039 / US | Inventor(s) | 01 /
Umotoy, Salvador P. 2801 Wildflower Drive Antioch, California 94509 / US | 02 /
Morrison, Alan F. 15221 Dickens Avenue San Jose, California 95124 / US | 03 /
Littau, Karl A. 3278 Bryant Street Palo Alto, California 94303 / US | 04 /
Marsh, Richard A. 5908 Charles Schreiner Trail Austin, Texas 58759 / US | 05 /
Lei, Lawrence Chung-Lai 1594 Country Club Drive Milpitas, California 95035 / US | [1997/06] |
| Former [1996/50] | 01 /
Umotoy, Salvador P. 2801 Wildflower Drive Antioch, California 94509 / US | ||
| 02 /
Morrison, Alan F. 15221 Dickens Avenue San Jose, California 95124 / US | |||
| 03 /
Littau, Karl A. 3278 Bryant Street Palo Alto, California 94303 / US | |||
| 04 /
Marsh, Richard A. 5908 Charles Schreiner Trail Austin, Palo Alto 58759 / US | |||
| 05 /
Lei, Lawrence Chung-Lai 1594 Country Club Drive Milpitas, California 95035 / US | Representative(s) | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [1996/50] | Bayliss, Geoffrey Cyril, et al BOULT, WADE & TENNANT 27 Furnival Street London EC4A 1PQ / GB | Application number, filing date | 96304243.7 | 06.06.1996 | [1996/50] | Priority number, date | US19950472220 | 07.06.1995 Original published format: US 472220 | [1996/50] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0747934 | Date: | 11.12.1996 | Language: | EN | [1996/50] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 25.09.1996 | Classification | IPC: | H01L21/00 | [1996/50] | CPC: |
C23C16/45521 (EP,US);
H01L21/203 (KR);
C23C16/458 (EP,US);
C23C16/4583 (EP,US);
C23C16/4585 (EP,US);
C23C16/46 (EP,US);
H01L21/67103 (EP,US);
H01L21/68 (EP,US);
H01L21/6833 (EP,US);
| Designated contracting states | DE, FR, GB, IT, NL [1996/50] | Title | German: | Vorrichtung zur Unterstützung von Substrate in Bearbeitungskammer | [1996/50] | English: | Apparatus for supporting substrates in processing chambers | [1996/50] | French: | Dispositif de soutien de substrats dans chambres de traitement | [1996/50] | Examination procedure | 13.05.1997 | Examination requested [1997/28] | 01.02.2000 | Despatch of a communication from the examining division (Time limit: M04) | 09.06.2000 | Reply to a communication from the examining division | 26.02.2002 | Despatch of a communication from the examining division (Time limit: M06) | 05.09.2002 | Reply to a communication from the examining division | 04.06.2003 | Despatch of a communication from the examining division (Time limit: M02) | 15.08.2003 | Application deemed to be withdrawn, date of legal effect [2004/09] | 22.09.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2004/09] | Fees paid | Renewal fee | 27.05.1998 | Renewal fee patent year 03 | 19.04.1999 | Renewal fee patent year 04 | 02.05.2000 | Renewal fee patent year 05 | 25.05.2001 | Renewal fee patent year 06 | 27.05.2002 | Renewal fee patent year 07 | 23.05.2003 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US5326725 (SHERSTINSKY SEMYON [US], et al) [A] 1,11,21 * column 2, line 24 - column 2, line 68; figures 3,4 *; | [A]EP0497267 (APPLIED MATERIALS INC [US]) [A] 1 * column 7, line 5 - column 7, line 27; figure 6 *; | [A]EP0619381 (APPLIED MATERIALS INC [US]) [A] 1 * column 7, line 1 - column 7, line 20; figure 6 * |