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Extract from the Register of European Patents

EP About this file: EP0762078

EP0762078 - Apparatus and method for measuring the thickness of the layers of a multi-layer transparent film [Right-click to bookmark this link]
Former [1997/11]System for determining the thickness and index of refraction of a film
[2006/47]
StatusThe application is deemed to be withdrawn
Status updated on  14.09.2007
Database last updated on 14.09.2024
Most recent event   Tooltip14.09.2007Application deemed to be withdrawnpublished on 17.10.2007  [2007/42]
Applicant(s)For all designated states
Agilent Technologies, Inc.
- a Delaware Corporation - 5301 Stevens Creek Boulevard
Santa Clara CA 95051 / US
[N/P]
Former [2007/04]For all designated states
Agilent Technologies, Inc.
- a Delaware Corporation - 5301 Stevens Creek Boulevard
Santa Clara, CA 95051 / US
Former [2001/41]For all designated states
Agilent Technologies, Inc. (a Delaware corporation)
395 Page Mill Road
Palo Alto, CA 94303 / US
Former [2001/32]For all designated states
Agilent Technologies Inc. a Delaware Corporation
395 Page Mill Road
Palo Alto, CA 94303 / US
Former [2001/31]For all designated states
Agilent Technologies Inc.
a Delaware Corporation 395 Page Mill Road
Palo Alto, CA 94303 / US
Former [2001/14]For all designated states
Agilent Technologies, Inc.
395 Page Mill Road
Palo Alto, CA 94303 / US
Former [2001/13]For all designated states
Hewlett-Packard Company, A Delaware Corporation
3000 Hanover Street
Palo Alto, CA 94304 / US
Former [1997/11]For all designated states
Hewlett-Packard Company
3000 Hanover Street
Palo Alto, California 94304 / US
Inventor(s)01 / Venkatesh, Shalini
1078 Pomeroy Avenue
Santa Clara, California 95051 / US
02 / Heffner, Brian L.
1449 Topar Avenue
Los Altos, California 94024 / US
03 / Sorin, Wayne V.
3579 Cambridge Lane
Mountain View, California 94040 / US
[1997/11]
Representative(s)Jehan, Robert, et al
Williams Powell
44 Prospect Place
Bromley, Kent BR2 9HN / GB
[N/P]
Former [1997/11]Jehan, Robert, et al
Williams, Powell & Associates, 34 Tavistock Street
London WC2E 7PB / GB
Application number, filing date96305828.408.08.1996
[1997/11]
Priority number, dateUS1995052019828.08.1995         Original published format: US 520198
[1997/11]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0762078
Date:12.03.1997
Language:EN
[1997/11]
Type: A3 Search report 
No.:EP0762078
Date:07.01.1998
[1998/02]
Search report(s)(Supplementary) European search report - dispatched on:EP13.11.1997
ClassificationIPC:G01B11/06, G01N21/41
[1997/11]
CPC:
G01N21/41 (EP,US); G01B11/0675 (EP,US)
Designated contracting statesDE,   FR,   GB [1997/11]
TitleGerman:Vorrichtung und Verfahren zur Messung der Dicke der Schichten einer transparenten Mehrschichtfilmstruktur[2006/47]
English:Apparatus and method for measuring the thickness of the layers of a multi-layer transparent film[2006/47]
French:Dispositif et procédé de mesure de l'épaisseur des couches d'une structure multicouche en film transparente[2006/47]
Former [1997/11]System zum Determinieren der Dicke und des Bruchungsindexes eines Dünnfilms
Former [1997/11]System for determining the thickness and index of refraction of a film
Former [1997/11]Système pour la détermination de l'épaisseur et de l'indice de réfraction d'une pellicule
Examination procedure04.05.1998Examination requested  [1998/27]
24.04.2001Despatch of a communication from the examining division (Time limit: M04)
27.08.2001Reply to a communication from the examining division
15.01.2002Despatch of a communication from the examining division (Time limit: M04)
13.05.2002Reply to a communication from the examining division
28.11.2003Date of oral proceedings
16.12.2003Despatch of communication that the application is refused, reason: substantive examination {1}
16.12.2003Minutes of oral proceedings despatched
07.11.2006Communication of intention to grant the patent
20.03.2007Application deemed to be withdrawn, date of legal effect  [2007/42]
23.05.2007Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time  [2007/42]
Appeal following examination09.02.2004Appeal received No.  T0603/04
13.04.2004Statement of grounds filed
07.04.2003Appeal received
23.06.2003Statement of grounds filed
29.07.2003Interlocutory revision of appeal
Fees paidRenewal fee
27.07.1998Renewal fee patent year 03
21.07.1999Renewal fee patent year 04
21.07.2000Renewal fee patent year 05
21.08.2001Renewal fee patent year 06
21.08.2002Renewal fee patent year 07
25.08.2003Renewal fee patent year 08
23.08.2004Renewal fee patent year 09
19.08.2005Renewal fee patent year 10
29.08.2006Renewal fee patent year 11
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Documents cited:Search[X]US4647205  (KALLIOMAEKI KALEVI J [FI], et al) [X] 1,5,6,10 * abstract * * column 4, line 29 - column 5, line 26; figure 3 *;
 [A]US5341205  (MCLANDRICH MATTHEW N [US], et al) [A] 1 * abstract *;
 [X]  - SORIN W V ET AL, "SIMULTANEOUS THICKNESS AND GROUP INDEX MEASUREMENT USING OPTICAL LOW-COHERENCE REFLECTOMETRY", IEEE PHOTONICS TECHNOLOGY LETTERS, (19920101), vol. 4, no. 1, pages 105 - 107, XP000244587 [X] 1,3,5,6,8,10 * the whole document *

DOI:   http://dx.doi.org/10.1109/68.124892
 [A]  - FLOURNOY P A ET AL, "WHITE-LIGHT INTERFEROMETRIC THICKNESS GAUGE", APPLIED OPTICS, (197209), vol. 11, no. 9, pages 1907 - 1915, XP002027922 [A] 1 * the whole document *

DOI:   http://dx.doi.org/10.1364/AO.11.001907
 [A]  - GEERKENS J ET AL, "INTERFEROMETRIE MIT LICHT KURZER KOHARENZLANGE ZUR ABSOLUTEN MESSUNG VON ABSTANDEN UND DICKEN", MICROTECNIC, (19940101), no. 4, pages 8 - 10, XP000495354 [A] 1 * page 9, column M, line 24 - page 10, column R, line 8; figure 4 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.