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EP0842531
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EP About this file: EP0842531
| EP0842531 - A METHOD FOR THE LOW TEMPERATURE CLEANING OF SUBSTRATES CONTAINING INDIUM OR ANTIMONY [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 27.08.1999 Database last updated on 24.08.2024 | Most recent event Tooltip | 27.08.1999 | Withdrawal of application | published on 13.10.1999 [1999/41] | Applicant(s) | For all designated states THE SECRETARY OF STATE FOR DEFENCE Defence Research Agency Farnborough Hampshire GU14 6TD / GB | [N/P] |
| Former [1998/21] | For all designated states THE SECRETARY OF STATE FOR DEFENCE Defence Research Agency Farnborough, Hampshire GU14 6TD / GB | Inventor(s) | 01 /
WHITAKER, Timothy, John Defence Research Agency St Andrews Road Malvern Worcs. WR14 3PS / GB | 02 /
MARTIN, Trevor Defence Research Agency St Andrews Road Malvern Worcs. WR14 3PS / GB | 03 /
JOHNSON, Andrew, David Defence Research Agency St Andrews Road Malvern Worcs. WR14 3PS / GB | 04 /
FREER, Richard, William Defence Research Agency St Andrews Road Malvern Worcs. WR14 3PS / GB | [1998/21] | Representative(s) | Skelton, Stephen Richard Ministry of Defence Directorate of Intellectual Property Rights Formalities Section Poplar 2 MOD Abbey Wood 19 Bristol BS34 8JH / GB | [N/P] |
| Former [1998/21] | Skelton, Stephen Richard D/IPR (DERA) Formalities Poplar 2a MOD (PE) Abbey Wood #19 P.O. Box 702 Bristol BS12 7DU / GB | Application number, filing date | 96925907.6 | 01.08.1996 | [1998/21] | WO1996GB01864 | Priority number, date | GB19950015902 | 03.08.1995 Original published format: GB 9515902 | [1998/21] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9706555 | Date: | 20.02.1997 | Language: | EN | [1997/09] | Type: | A1 Application with search report | No.: | EP0842531 | Date: | 20.05.1998 | Language: | EN | The application published by WIPO in one of the EPO official languages on 20.02.1997 takes the place of the publication of the European patent application. | [1998/21] | Search report(s) | International search report - published on: | EP | 20.02.1997 | Classification | IPC: | H01L21/306 | [1998/21] | CPC: |
H01L21/02052 (EP)
| Designated contracting states | DE, FR, GB [1998/21] | Title | German: | EIN VERFAHREN ZUM NIEDERTEMPERATUR-REINIGEN VON SUBSTRATEN, DIE INDIUM UND ANTIMON ENTHALTEN | [1998/21] | English: | A METHOD FOR THE LOW TEMPERATURE CLEANING OF SUBSTRATES CONTAINING INDIUM OR ANTIMONY | [1998/21] | French: | PROCEDE DE NETTOYAGE A BASSE TEMPERATURE DE SUBSTRATS CONTENANT DE L'INDIUM OU DE L'ANTIMOINE | [1998/21] | Entry into regional phase | 29.01.1998 | National basic fee paid | 29.01.1998 | Designation fee(s) paid | 29.01.1998 | Examination fee paid | Examination procedure | 27.02.1997 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 29.01.1998 | Examination requested [1998/21] | 23.09.1998 | Despatch of a communication from the examining division (Time limit: M04) | 18.01.1999 | Reply to a communication from the examining division | 17.08.1999 | Application withdrawn by applicant [1999/41] | Fees paid | Renewal fee | 20.07.1998 | Renewal fee patent year 03 | 20.07.1999 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [PA]US5458689 (SAITO JUNJI) [PA] 1 * column 3, line 7 - line 44 * | [X] - YASUHIKO NOMURA ET AL, "Low-Temperature Surface Cleaning of GaAs Using Trisdimethylaminoarsine", JAPANESE JOURNAL OF APPLIED PHYSICS, TOKYO, (19941213), vol. 33, no. 12B, pages L1744 - L1747, XP002014293 [X] 1-4 * page L1744, column R - page L1745, column L * DOI: http://dx.doi.org/10.1143/JJAP.33.L1744 |