-
EP0839586
European procedure
Extract from the Register of European Patents
EP About this file: EP0839586
| EP0839586 - A cleaning apparatus and a cleaning method [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 12.11.2004 Database last updated on 12.07.2024 | Most recent event Tooltip | 10.08.2012 | Lapse of the patent in a contracting state | published on 12.09.2012 [2012/37] | Applicant(s) | For all designated states Pre-Tech Co., Ltd. 2-1-14, Fuchucho Fuchu-shi Tokyo / JP | [N/P] |
| Former [2003/06] | For all designated states Pre-Tech Co., Ltd. 2-1-14, Fuchucho Fuchu-shi, Tokyo / JP | ||
| Former [1998/19] | For all designated states Pre-Tech Co., Ltd. 2-1-14, Fuchucho Fuchu-shi, Tokyo / JP | ||
| For all designated states SHIN-ETSU HANDOTAI COMPANY LIMITED 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo / JP | Inventor(s) | 01 /
Netsu, Shigeyoshi A 3-1, Desa Palma, Persiaran Madge 55000 Kuala Lumpur / MY | 02 /
Harada, Yasuysuki 1-38-3, Karakida Tama-shi, Tokyo / JP | 03 /
Shiba, Kazuhiko 4-1-3-1308, Toshinden Shizuoka-shi, Shizuoka-ken / JP | [2003/26] |
| Former [1998/19] | 01 /
Netsu, Shigeyoshi A 3-1, Desa Palma, Persiaran Madge 55000 Kuala Lumpur / MY | ||
| 02 /
Harada, Yasyusuki 1-38-3, Karakida Tama-shi, Tokyo / JP | |||
| 03 /
Shiba, Kazuhiko 4-1-3-1308, Toshinden Shizuoka-shi, Shizuoka-ken / JP | Representative(s) | Popp, Eugen, et al Meissner Bolte Patentanwälte Rechtsanwälte Partnerschaft mbB Postfach 86 06 24 81633 München / DE | [N/P] |
| Former [2009/48] | Popp, Eugen, et al Meissner, Bolte & Partner GbR Postfach 86 06 24 81633 München / DE | ||
| Former [1998/19] | Popp, Eugen, Dr., et al MEISSNER, BOLTE & PARTNER Postfach 86 06 24 81633 München / DE | Application number, filing date | 97118982.4 | 30.10.1997 | [1998/19] | Priority number, date | JP19960288481 | 30.10.1996 Original published format: JP 28848196 | [1998/19] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0839586 | Date: | 06.05.1998 | Language: | EN | [1998/19] | Type: | A3 Search report | No.: | EP0839586 | Date: | 08.12.1999 | [1999/49] | Type: | B1 Patent specification | No.: | EP0839586 | Date: | 07.01.2004 | Language: | EN | [2004/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.10.1999 | Classification | IPC: | B08B3/08, B08B3/12, H01L21/00, B08B3/02 | [1999/49] | CPC: |
H01L21/02052 (EP,US);
H01L21/304 (KR);
B08B3/02 (EP,US);
B08B3/10 (EP,US);
B08B3/12 (EP,US);
G11B23/505 (EP,US);
|
| Former IPC [1998/19] | B08B3/08, B08B3/12, H01L21/00 | Designated contracting states | DE, FR, GB, IT [2000/33] |
| Former [1998/19] | AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Vorrichtung und Verfahren zum Reinigen | [1998/19] | English: | A cleaning apparatus and a cleaning method | [1998/19] | French: | Dispositif et procédé de nettoyage | [1998/19] | Examination procedure | 14.01.1998 | Examination requested [1998/19] | 27.02.2002 | Despatch of a communication from the examining division (Time limit: M06) | 29.08.2002 | Reply to a communication from the examining division | 17.09.2002 | Despatch of a communication from the examining division (Time limit: M04) | 13.01.2003 | Reply to a communication from the examining division | 31.01.2003 | Despatch of a communication from the examining division (Time limit: M02) | 04.04.2003 | Reply to a communication from the examining division | 20.05.2003 | Communication of intention to grant the patent | 30.09.2003 | Fee for grant paid | 30.09.2003 | Fee for publishing/printing paid | Opposition(s) | 08.10.2004 | No opposition filed within time limit [2004/53] | Fees paid | Renewal fee | 29.10.1999 | Renewal fee patent year 03 | 20.10.2000 | Renewal fee patent year 04 | 29.10.2001 | Renewal fee patent year 05 | 30.10.2002 | Renewal fee patent year 06 | 30.10.2003 | Renewal fee patent year 07 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPH07155709 ; | [AD]EP0605882 (NEC CORP [JP]) [AD] 1,7,17,21,22 * the whole document *; | [AP]EP0740329 (SHINETSU HANDOTAI KK [JP]) [AP] 1,7,17,21,22 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19951031), vol. 199, no. 509, & JP07155709 A 19950620 (SHIMADA PHYS & CHEM IND) [A] 1,7,17,21,22 * abstract * |