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EP0849637
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EP About this file: EP0849637
| EP0849637 - Illumination apparatus and exposure apparatus [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 31.03.2000 Database last updated on 10.05.2025 | Most recent event Tooltip | 31.03.2000 | Withdrawal of application | published on 17.05.2000 [2000/20] | Applicant(s) | For all designated states NIKON CORPORATION Fuji Building 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-0005 / JP | [N/P] |
| Former [1998/26] | For all designated states NIKON CORPORATION Fuji Building, 2-3 Marunouchi 3-chome, Chiyoda-ku Tokyo 100 / JP | Inventor(s) | 01 /
Tanitsu, Osamu c/o Nikon Corporation Fuji Building, 2-3, Marunouchi 3-chome Chiyoda-ku, Tokyo / JP | [1998/26] | Representative(s) | Füchsle, Klaus, et al Hoffmann - Eitle ATTENTION : ADDRESS INACTIVE - USE ASS-NR - CDR / DE | [N/P] |
| Former [1998/26] | Füchsle, Klaus, Dipl.-Ing., et al Hoffmann Eitle, Patent- und Rechtsanwälte, Arabellastrasse 4 81925 München / DE | Application number, filing date | 97120462.3 | 21.11.1997 | [1998/26] | Priority number, date | JP19960327585 | 22.11.1996 Original published format: JP 32758596 | [1998/26] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0849637 | Date: | 24.06.1998 | Language: | EN | [1998/26] | Type: | A3 Search report | No.: | EP0849637 | Date: | 05.01.2000 | [2000/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 23.11.1999 | Classification | IPC: | G03F7/20 | [1998/26] | CPC: |
G03F7/70058 (EP,US);
H01L21/027 (KR)
| Designated contracting states | AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [1998/26] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | Beleuchtungsvorrichtung und Belichtungsvorrichtung | [1998/26] | English: | Illumination apparatus and exposure apparatus | [1998/26] | French: | Dispositif d'illumination et dispositif d'exposition | [1998/26] | Examination procedure | 24.03.2000 | Application withdrawn by applicant [2000/20] | Fees paid | Renewal fee | 26.11.1999 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [DA]JPH08293461 (NIKON CORP) [DA] 1,8,11,14; | US5731577 [ ] (TANITSU OSAMU [JP]) [ ] * column 1, line 6 - line 15 * * column 4, line 55 - column 6, line 34 * * figure 1 *; | [A]EP0564264 (CANON KK [JP]) [A] 1,8,11,14 * column 16, line 8 - line 32 * * figure 22 *; | [A]EP0526242 (CANON KK [JP]) [A] 1,8,11,14 * column 16, line 7 - line 21 * * figure 4 * |