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Extract from the Register of European Patents

EP Citations: EP0834908

Cited inSearch
Type:Patent literature
Publication No.:EP0553967  [X]
 (SUBMICRON SYSTEMS INC [US]) [X] 1,6,11 * claims 1,4-6,9 *;
Type:Patent literature
Publication No.:US4736758  [A]
 (KUSUHARA MASAKI [JP]) [A] 1,5,9-11 * column 12, line 10 - line 39; figure 4; claim 1 *;
Type:Patent literature
Publication No.:US4028135  [A]
 (VIG JOHN R, et al) [A] 1 * claim 1 *;
Type:Patent literature
Publication No.:EP0297506  [A]
 (IBM DEUTSCHLAND [DE], et al) [A] 1 * claim 1 *